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[16] Inductively coupled plasma-emission spectrometry
1988Publisher Summary This chapter discusses the inductively coupled plasma-emission spectrometry (ICP). The ICP owes its popularity as an emission source to a number of attractive features but primarily to the fact that it enables simultaneous or rapid sequential multielement determination of major, minor, trace, and ultratrace elemental sample ...
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Microfabrication of inductively coupled plasma reactors
ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087), 2000Summary form only given. Microelectromechanical systems (MEMS) hold promise for incorporating sensors, actuators, and microelectronics in a single, monolithic package. It is also useful to include plasma generation capability within some MEMS devices for applications such as spectroscopic chemical analysis, mass spectrometry, micropropulsion, lighting,
Y. Yin, Jeffrey Hopwood
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Kinetics of etching in inductively coupled plasmas
Applied Surface Science, 2004Abstract A modified Langmuir type surface kinetics model was developed in our previous work for interpreting the overall etching behavior of silicon based materials in fluorocarbon discharges using inductively coupled plasma (ICP) reactors. This kinetics model was tested for the global applicability to the ICP etching, either for the etching of non ...
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Design of Inductively Coupled Plasma
Industrial & Engineering Chemistry Process Design and Development, 1968W. E. Ranz, D. R. Armstrong
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Talanta: The International Journal of Pure and Applied Analytical Chemistry, 2016
Shishuai Ma+5 more
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Shishuai Ma+5 more
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