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Inline Monitoring of Epoxy Molding Compound in Transfer Molding Process for Smart Power Modules
2016 IEEE 66th Electronic Components and Technology Conference (ECTC), 2016The quality of smart power modules strongly depends on the material characteristics of epoxy molding compound (EMC) and transfer molding process parameters. In order to predict the quality and to diminish the failure mechanisms, inline monitoring techniques in transfer molding process are essential.
Burcu Kaya +4 more
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New atomic force microscopy imaging for an inline large scale integration process monitor
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2003New imaging techniques in atomic force microscopy have been developed to suppress bending of the sharpened probe during scanning. After analyzing the bending of the probe, it is clear that the bending is caused by response of servo control and slip of the probe on the slope.
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International Symposium for Testing and Failure Analysis, 2010
Abstract This paper introduces a high volume and fast turnaround TEM sample preparation method and requirements for a 300 mm inline DualBeam (FIB/SEM) system with “hands-off” full automation. It requires a factory automation system, robust automated recipes, and an ex-situ TEM lamella liftout system. It describes the recipe structure and
Hyoung H. Kang +5 more
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Abstract This paper introduces a high volume and fast turnaround TEM sample preparation method and requirements for a 300 mm inline DualBeam (FIB/SEM) system with “hands-off” full automation. It requires a factory automation system, robust automated recipes, and an ex-situ TEM lamella liftout system. It describes the recipe structure and
Hyoung H. Kang +5 more
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SPIE Proceedings, 2016
The introduction of inline coherent imaging technologies as a sensor for the laser materials processing is accompanied by the integration into several applications. One of these is the measurement of the depth of the vapor capillary for laser welding applications, now allowing to keep record of the welding depth with an accuracy of micrometers and a ...
Markus Kogel-Hollacher +4 more
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The introduction of inline coherent imaging technologies as a sensor for the laser materials processing is accompanied by the integration into several applications. One of these is the measurement of the depth of the vapor capillary for laser welding applications, now allowing to keep record of the welding depth with an accuracy of micrometers and a ...
Markus Kogel-Hollacher +4 more
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Laser process monitoring and automatic control at kHz rates through inline coherent imaging
AIP Conference Proceedings, 2012Laser processing can achieve high transverse precision but control of the axial penetration depth in percussion drilling and keyhole welding has proved problematic. Processing can be highly stochastic (due to plasma, gas and melt flow dynamics).
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IEEE Transactions on Semiconductor Manufacturing, 2008
The fluctuation in the minority carrier lifetime (MCLT) measurement is observed when monitoring the metal contamination for the furnace performing denuded zone formation, and the mechanism responsible for this phenomenon is examined in this paper. Among various possible causes, the oxygen precipitates are found to be the main contributor for this MCLT ...
Yung-Hsien Wu +4 more
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The fluctuation in the minority carrier lifetime (MCLT) measurement is observed when monitoring the metal contamination for the furnace performing denuded zone formation, and the mechanism responsible for this phenomenon is examined in this paper. Among various possible causes, the oxygen precipitates are found to be the main contributor for this MCLT ...
Yung-Hsien Wu +4 more
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Inline Process Monitoring of Hairpin Welding Using Optical and Acoustic Quality Metrics
2022 12th International Electric Drives Production Conference (EDPC), 2022Markus Omlor +4 more
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Process Monitoring and Defect Detection of Additive Manufacturing Using Inline Coherent Imaging
2016With applications ranging from aerospace to biomedicine, additive manufacturing (AM) has been revolutionizing the manufacturing industry. The ability of additive techniques, such as selective laser melting (SLM), to create fully functional, geometrically complex, and unique parts out of high strength materials is of great interest.
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AkuProLas: Acoustic inline process monitoring for laser welding applications
2016Bastuck, Matthias +4 more
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