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Atomic Force Microscopy (AFM)-Based Metrology for Advanced Etching in Three-Dimensional Integrated Circuits. [PDF]
Micromachines (Basel)Chang J +4 more
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Cost reduction and quality preservation with digital scanner interfaces for optical coherence tomography. [PDF]
J Biomed OptKoo K, Lee L, McCloud M, Draelos M.
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Quasi-Linear Displacement Measurement with Laser Feedback Interferometry
2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2019 In laser feedback interferometry (LFI), a laser diode is shone onto a target and the reflection from that target is injected back into the laser cavity. It has been demonstrated that changes in the laser dynamics induced by the fed back light can be exploited to measure target displacement, absolute position, or velocity [1,2].
Daeyoung Choi, E A Viktorov, D S Citrin
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All-fiber laser feedback interferometry with 300 m transmission distance
Optics Letters, 2021A novel, to the best of our knowledge, interferometry based on the laser feedback technique with long transmission distance is proposed. The system has the advantages of high sensitivity for uncooperative targets and a simple structure. Also, the quasi-common path orthogonally polarized light compensation method is designed to compensate for the drift ...
Yifan Wang, Yuhang Li, Mingwang Tian
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Polarization-sensitive laser feedback interferometry for specular reflection removal [PDF]
Applied Optics, 2018 Specular reflection from the surface of targets or prepared specimens represents a significant problem in optical microscopy and related optical imaging techniques as usually the surface reflection does not contribute to the desired signal. Solutions exist for many of these imaging techniques; however, remedial techniques for imaging based on laser ...
Mowla, Alireza +5 more
core +5 more sources
Review of Scientific Instruments, 2014
The refractive index measurement by ordinary interferometers cannot avoid the air disturbances in the optical path. A novel approach is presented in this paper based on the Nd:YAG microchip laser feedback interferometry (MLFI) with 1064 nm wavelength. For eliminating the air flow and electric-heating influence the heterodyne modulation and quasi-common
Shulian Zhang +2 more
exaly +4 more sources
The refractive index measurement by ordinary interferometers cannot avoid the air disturbances in the optical path. A novel approach is presented in this paper based on the Nd:YAG microchip laser feedback interferometry (MLFI) with 1064 nm wavelength. For eliminating the air flow and electric-heating influence the heterodyne modulation and quasi-common
Shulian Zhang +2 more
exaly +4 more sources
Imaging and vibrational analysis with laser-feedback interferometry
Optics Letters, 1993We have constructed a scanning confocal laser-feedback microscope that determines surface profiles in the range of 5 nm to 3 μm with ~200-nm lateral discrimination. A direct comparison is made with scanning electron microscopy, and an image of a silicon resolution standard with 40-nm-high structures is shown.
Leslie C Osborne
exaly +3 more sources
Effect of the optical system on the Doppler spectrum in laser-feedback interferometry
Applied Optics, 2014We present a comprehensive analysis of factors influencing the morphology of the Doppler spectrum obtained from a laser-feedback interferometer. We explore the effect of optical system parameters on three spectral characteristics: central Doppler frequency, broadening, and signal-to-noise ratio.
Mowla, Alireza +6 more
openaire +4 more sources