Results 271 to 280 of about 112,162 (295)
Some of the next articles are maybe not open access.
Evaluation of methods for noise-free measurement of LER/LWR using synthesized CD-SEM images
Advanced Lithography, 2013V. Constantoudis, E. Pargon
semanticscholar +1 more source
A Physics-Based Model for LER-Induced Threshold Voltage Variations in Double-Gate MOSFET
Journal of Computational Electronics, 2020Bindu B
exaly
A Comprehensive LER-Aware TDDB Lifetime Model for Advanced Cu Interconnects
IEEE transactions on device and materials reliability, 2011M. Stucchi +4 more
semanticscholar +1 more source
LER Limitations of Resist Thin Films
Journal of Photopolymer Science and Technology = [Fotoporima Konwakai Shi], 2012Brian Cardineau +2 more
exaly
IEEE Transactions on Electron Devices, 2010
D. Reid, C. Millar, Scott Roy, A. Asenov
semanticscholar +1 more source
D. Reid, C. Millar, Scott Roy, A. Asenov
semanticscholar +1 more source

