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Stress-Induced Directed Self-Assembly of Perpendicularly Oriented Block Copolymer Lamellae for Lithographic Density Multiplication. [PDF]

open access: yesACS Appl Mater Interfaces
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Mechanochemical Lithography

Journal of the American Chemical Society, 2022
Surfaces with patterned biomolecules have wide applications in biochips and biomedical diagnostics. However, most patterning methods are inapplicable to physiological conditions and incapable of creating complex structures. Here, we develop a mechanochemical lithography (MCL) method based on compressive force-triggered reactions.
Yuehai Mei   +8 more
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Soft Lithography

Angewandte Chemie International Edition, 1998
Abstract  Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures.
Younan, Xia, George M, Whitesides
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LITHOGRAPHY

2020
Lithography became an essential tool for materials research during the post-World War II computing revolution. Increasing computing power required shrinking circuits and packing transistors more tightly together. Lithography made it possible to write small, precise circuits on a semiconducting surface, setting the stage for modern computing and fueling
Martin, Joseph D., Mody, Cyrus C. M.
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