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Inverse Design and 3D Printing of a Metalens on an Optical Fiber Tip for Direct Laser Lithography.
Nano letters (Print), 2021An inverse-designed metalens is proposed, designed, and fabricated on an optical fiber tip via a 3D direct laser-writing technique through two-photon polymerization.
W. Hadibrata +3 more
semanticscholar +1 more source
Journal of the American Chemical Society, 2022
Surfaces with patterned biomolecules have wide applications in biochips and biomedical diagnostics. However, most patterning methods are inapplicable to physiological conditions and incapable of creating complex structures. Here, we develop a mechanochemical lithography (MCL) method based on compressive force-triggered reactions.
Yuehai Mei +8 more
openaire +2 more sources
Surfaces with patterned biomolecules have wide applications in biochips and biomedical diagnostics. However, most patterning methods are inapplicable to physiological conditions and incapable of creating complex structures. Here, we develop a mechanochemical lithography (MCL) method based on compressive force-triggered reactions.
Yuehai Mei +8 more
openaire +2 more sources
Monolithic microfabricated valves and pumps by multilayer soft lithography.
Science, 2000Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer
M. Unger +4 more
semanticscholar +1 more source
Science, 2005
We report a high-throughput procedure for lithographically processing one-dimensional nanowires. This procedure, termed on-wire lithography, combines advances in template-directed synthesis of nanowires with electrochemical deposition and wet-chemical etching and allows routine fabrication of face-to-face disk arrays and gap structures in the range of ...
Sungho Park +3 more
openaire +3 more sources
We report a high-throughput procedure for lithographically processing one-dimensional nanowires. This procedure, termed on-wire lithography, combines advances in template-directed synthesis of nanowires with electrochemical deposition and wet-chemical etching and allows routine fabrication of face-to-face disk arrays and gap structures in the range of ...
Sungho Park +3 more
openaire +3 more sources
Soft lithography in biology and biochemistry.
Annual Review of Biomedical Engineering, 2001Soft lithography, a set of techniques for microfabrication, is based on printing and molding using elastomeric stamps with the patterns of interest in basrelief. As a technique for fabricating microstructures for biological applications, soft lithography
G. Whitesides +4 more
semanticscholar +1 more source
AFM lithography combined with optical lithography
Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387), 2002Reports on a hybrid method of AFM lithography and optical lithography that increases the drawing speed and decreases the drawing length. Advanced devices, such as quantum ones, have both nanometer-scale structures and large area structures, such as contact pads. It takes a long time to fabricate all the patterns using AFM lithography alone.
T. Hashizume +2 more
openaire +2 more sources
Advances in Materials, 2020
The development of a simple and cost‐effective method for fabricating ≈10 nm scale nanopatterns over large areas is an important issue, owing to the performance enhancement such patterning brings to various applications including sensors, semiconductors,
Woo-Bin Jung +4 more
semanticscholar +1 more source
The development of a simple and cost‐effective method for fabricating ≈10 nm scale nanopatterns over large areas is an important issue, owing to the performance enhancement such patterning brings to various applications including sensors, semiconductors,
Woo-Bin Jung +4 more
semanticscholar +1 more source
, 2001
Nanosphere lithography (NSL) is an inexpensive, simple to implement, inherently parallel, high throughput, materials general nanofabrication technique capable of producing an unexpectedly large variety of nanoparticle structures and well-ordered 2D ...
C. Haynes, R. P. Duyne
semanticscholar +1 more source
Nanosphere lithography (NSL) is an inexpensive, simple to implement, inherently parallel, high throughput, materials general nanofabrication technique capable of producing an unexpectedly large variety of nanoparticle structures and well-ordered 2D ...
C. Haynes, R. P. Duyne
semanticscholar +1 more source
Advanced Energy Materials, 2018
In this work, a simple lignin‐based laser lithography technique is developed and used to fabricate on‐chip microsupercapacitors (MSCs) using 3D graphene electrodes.
Wenli Zhang +5 more
semanticscholar +1 more source
In this work, a simple lignin‐based laser lithography technique is developed and used to fabricate on‐chip microsupercapacitors (MSCs) using 3D graphene electrodes.
Wenli Zhang +5 more
semanticscholar +1 more source
GAN-OPC: Mask Optimization with Lithography-guided Generative Adversarial Nets
Design Automation Conference, 2018Mask optimization has been a critical problem in the VLSI design flow due to the mismatch between the lithography system and the continuously shrinking feature sizes.
Haoyu Yang +4 more
semanticscholar +1 more source