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Advances in Nanoimprint Lithography.
Annual Review of Chemical and Biomolecular Engineering, 2016Nanoimprint lithography (NIL), a molding process, can replicate features
M. Traub, Whitney Longsine, V. Truskett
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Nanomachining by Colloidal Lithography
Small, 2006AbstractColloidal lithography is a recently emerging field; the evolution of this simple technique is still in progress. Recent advances in this area have developed a variety of practical routes of colloidal lithography, which have great potential to replace, at least partially, complex and high‐cost advanced lithographic techniques.
Yang, SM Yang, Seung-Man +4 more
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Microfluidic Lithography of Bioinspired Helical Micromotors.
Angewandte Chemie, 2017Considerable efforts have been devoted to developing artificial micro/nanomotors that can convert energy into movement. A flow lithography integrated microfluidic spinning and spiraling system is developed for the continuous generation of bioinspired ...
Yunru Yu +5 more
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Nanobiotechnology: Soft Lithography
2009An entirely new scientific and technological area has been born from the combination of nanotechnology and biology: nanobiotechnology. Such a field is primed especially by the strong potential synergy enabled by the integration of technologies, protocols, and investigation methods, since, while biomolecules represent functional nanosystems interesting ...
MELE E, PISIGNANO, Dario
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193 lithography and RELACS processing for BEOL lithography
SPIE Proceedings, 2001This paper presents data obtained in developing a process using 193 nm lithography and the RELACS contact hole shrink technique. For the line/space levels, process windows showing resist performance using chrome on glass masks are presented. Data showing feature size linearity and the requirements for optical proximity correction (OPC) are presented ...
Richard A. Ferguson +10 more
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Nano Letters
As Moore's Law continues to push critical dimension (CD) scaling in integrated circuits, conventional photolithography approaches fundamental resolution limits. While alternative strategies such as self-aligned double patterning and directed self-assembly address these challenges, they introduce process complexity and manufacturing variability. Here we
Yuxiang Yin +4 more
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As Moore's Law continues to push critical dimension (CD) scaling in integrated circuits, conventional photolithography approaches fundamental resolution limits. While alternative strategies such as self-aligned double patterning and directed self-assembly address these challenges, they introduce process complexity and manufacturing variability. Here we
Yuxiang Yin +4 more
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Polyimides in lithography [PDF]
Polymer Engineering & Science, 1977 AbstractPolyimides and Polyamide‐imides have a high thermal and dimensional stability, good properties, and resistance to attack by solvents. These features, along with their electrical properties, have led to their wide acceptance in the electronics industry.
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EUV computational lithography using accelerated topographic mask simulation
Advanced Lithography, 2019As EUV lithography is getting ready for deployment in high volume manufacturing, lithography engineering focus moves to efficient computational lithography tools (mask correction, verification, source-, mask- and processoptimization) providing optimal ...
V. Domnenko +9 more
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Immersion Lithography and the Limits of Optical Lithography
2010In Chapter 2, where the parameter numerical aperture was introduced, it was defined as n sin θ, where n is the index of refraction of the medium between the lens and the resist on the wafer, and θ is the half angle subtended by the lens. By geometry, and the fact that light travels in a straight line through homogeneous media, the largest value ...
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Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter
, 1997Dense periodic arrays of holes and dots have been fabricated in a silicon nitride–coated silicon wafer. The holes are 20 nanometers across, 40 nanometers apart, and hexagonally ordered with a polygrain structure that has an average grain size of 10 by 10.
Miri Park +4 more
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