Results 351 to 360 of about 301,025 (376)
Some of the next articles are maybe not open access.
IEEE Circuits and Devices Magazine, 1988
Current capabilities and advances in optical electron-beam, X-ray, and ion-beam lithography are discussed. Attention is restricted to the creation of the resist pattern. Equipment, resists, and processing are examined. >
openaire +2 more sources
Current capabilities and advances in optical electron-beam, X-ray, and ion-beam lithography are discussed. Attention is restricted to the creation of the resist pattern. Equipment, resists, and processing are examined. >
openaire +2 more sources
Imprint Lithography with 25-Nanometer Resolution
Science, 1996S. Chou, P. R. Krauss, P. J. Renstrom
semanticscholar +1 more source
Bio-resin for high resolution lithography-based biofabrication of complex cell-laden constructs
Biofabrication, 2018K. Lim +10 more
semanticscholar +1 more source
2016
At the heart of lithography are chemical transformations designed to print a relief image of an object on a flat surface. The printing involves the registration of information in the imaging layer, referred to as the resist, by means of electromagnetic radiation, or molecular self-assembly, or by embossing/imprinting.
openaire +2 more sources
At the heart of lithography are chemical transformations designed to print a relief image of an object on a flat surface. The printing involves the registration of information in the imaging layer, referred to as the resist, by means of electromagnetic radiation, or molecular self-assembly, or by embossing/imprinting.
openaire +2 more sources
Nanofabrication by electron beam lithography and its applications
, 2015Yifang Chen
semanticscholar +1 more source
Fabrication of photonic crystals for the visible spectrum by holographic lithography
Nature, 2000M. Campbell +5 more
semanticscholar +1 more source