Results 371 to 376 of about 301,025 (376)
Some of the next articles are maybe not open access.

Atomic lithography

Microelectronic Engineering, 1998
B. Brezger   +7 more
openaire   +2 more sources

Stochastic effects in EUV lithography

Advanced Lithography, 2018
P. De Bisschop, E. Hendrickx
semanticscholar   +1 more source

Nanoimprint Lithography

2007
Helmut Schift, Anders Kristensen
openaire   +1 more source

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