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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
Microsystems and Nanoengineering, 2023Zhikang Li, Libo Zhao
exaly
Full-range birefringence control with piezoelectric MEMS-based metasurfaces
Nature Communications, 2022Chao Meng, Paul Thrane, Fei Ding
exaly
Patient adherence and persistence with oral anticancer treatment
Ca-A Cancer Journal for Clinicians, 2009Kathryn J Ruddy, Ann H Partridge
exaly
Development Trends and Perspectives of Future Sensors and MEMS/NEMS
Micromachines, 2020Jianxiong Zhu +2 more
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Distortion-free measurement of electric field strength with a MEMS sensor
Nature Electronics, 2018Andreas Kainz +2 more
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