Results 301 to 310 of about 235,895 (350)
Some of the next articles are maybe not open access.
2017
Breakthrough Technology Microsystems to Nano-Microsystems: A Technological Breakthrough Hauden Daniel HfO2-Based High-kappa Dielectrics for Use in MEMS Applications Bing Miao, Rajat Mahapatra, Nick Wright, and Alton Horsfall Piezoelectric Thin Films for MEMS Applications Isaku Kanno CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes Ajit Sharma,
openaire +1 more source
Breakthrough Technology Microsystems to Nano-Microsystems: A Technological Breakthrough Hauden Daniel HfO2-Based High-kappa Dielectrics for Use in MEMS Applications Bing Miao, Rajat Mahapatra, Nick Wright, and Alton Horsfall Piezoelectric Thin Films for MEMS Applications Isaku Kanno CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes Ajit Sharma,
openaire +1 more source
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Nanoscale Research Letters, 2021Abdullah S Algamili +2 more
exaly
Fast-response MEMS xylene gas sensor based on CuO/WO3 hierarchical structure
Journal of Hazardous Materials, 2022Xiaohong Wang, Jiaqiang Xu
exaly
Displays, Sensors, and MEMS - RF MEMS
2007 IEEE International Electron Devices Meeting, 2007Werner Weber, Thomas A. Friedman
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