Results 11 to 20 of about 180,594 (284)

Random Vibration Evaluation and Optimization of a Flexible Positioning Platform Considering Power Spectral Density [PDF]

Sensors
The flexible positioning platform is a critical structural component in the ultra-high acceleration macro–micro motion platform, enabling precise positioning across multiple scales.
Lufan Zhang, Mengyuan Hu, Heng Yan, Hehe Sun, Zhenghui Zhang, Peijuan Wu   +5 more
doaj   +2 more sources

Multi-objective optimization of flexible positioning platform considering displacement frequency and dynamic stiffness responses [PDF]

Scientific Reports
In order to study the impact of periodic loads on the vibration performance of the flexible positioning platform in the key mechanisms of the ultra-high acceleration macro–micro motion platform, and to improve the performance and stability of the ...
Lufan Zhang, Heng Yan, Hehe Sun, Mengyuan Hu   +3 more
doaj   +2 more sources

Research on Micro-/Nano-Positioning System Driven by a Stepper Motor

Actuators
To achieve cost-effective micro-/nano-displacement adjustment, this paper integrates the advantages of flexible hinge micro-/nano-displacement transmission.
Minjie Liu, Yangyang Yu, Liangyu Cui, Ning Ji, Xiaofan Deng   +4 more
doaj   +3 more sources

Application of adaptive inverse compensation feedforward—MPC feedback control to AFM piezoelectric micro-positioning platform

Smart Materials and Structures
Abstract As the integral constituent of atomic force microscope (AFM), piezoelectric micro-positioning platform (PMP) plays an pivotal role in AFM working accuracy. However, the PMP platform has hysteretic nonlinear characteristics, which bring challenges to high-precision positioning applications, especially in large travel applications.
Liu Xinliang, Zhengxun Song, Li Chen, Tian Liguo, Wang Guoliang   +4 more
openalex   +2 more sources

Research and Improvement of Flexible Micro-positioning Platform with a Three-dimensional Bridge-type Amplification Mechanism

Jixie chuandong
In the design of the micro-positioning platform, a three-dimensional bridge-type amplification mechanism capable of generating high displacement amplification ratio was introduced. On this basis, a four-bar symmetric guiding mechanism was incorporated to
Zhao Zhiquan, Zhu Xijing, Li Jing, Cui Jiajun   +3 more
doaj   +1 more source

Design and Analysis of a Novel 3-DOF Large Stroke Micro-positioning Platform

Journal of Mechanical Engineering, 2013
Yangmin Li
  +4 more sources

Research trends in China for macro-micro motion platform for microelectronics manufacturing industry

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021
Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic ...
Xueli LI, Lufan ZHANG, Boshi JIANG, Jiwen FANG, Yaxin ZHENG   +4 more
doaj   +1 more source

Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash

Machines, 2023
A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing ...
Shuo Kang, Buyang Zhang, Xing Huang, Rijin Zhong, Shengzhao Huang   +4 more
doaj   +1 more source

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification

Micromachines, 2023
This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators.
Tao Zhang, Liuguang Xiong, Zequan Pan, Chunhua Zhang, Wen Qu, Yuhang Wang, Chunmei Yang   +6 more
doaj   +1 more source

Nonlinear characteristics of the driving model of the coaxial integrated macro–micro composite actuator [PDF]

Mechanical Sciences, 2022
Nonlinearity is one of the important factors affecting the positioning accuracy of the macro–micro composite actuator. To improve the positioning accuracy of the driving model of the macro–micro composite actuator, this paper combines the research ...
C. Yu, Y. Wang, Z. Xiao, G. Wu, Y. Duan, K. Yang   +5 more
doaj   +1 more source