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Rate-dependent modeling and tracking control for piezoelectric micro-positioning platform
2017 Chinese Automation Congress (CAC), 2017A rate-dependent modeling method and a real-time tracking control scheme are designed to eliminate the hysteresis nonlinearity of the piezoelectric micro positioning (PMP) platform. First, we use Duhem model cascaded a transfer function to structure the rate-dependent hysteresis nonlinearity of the PMP platform.
Chenyang Wang, Miaolei Zhou, Rui Xu
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Pole Placement Control of Piezoelectric Micro-positioning Platform Based on Hysteresis Compensation
Xiguo Zhao +5 more
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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 2013
High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever
Chen Li-guo +4 more
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High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever
Chen Li-guo +4 more
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Improved Mode-Free Adaptive Control for Piezoelectric Micro-Positioning Platform
2023 6th International Conference on Intelligent Robotics and Control Engineering (IRCE), 2023Tiannan Li +3 more
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Design of a Micro-Nano Positioning Platform Based on Stick-Slip Driving
Qian Cheng Guo +2 more
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Positioning control of a 3-DOF micro parallel mechanism platform using a dual stage servo system
서태원
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LM Based Parameter Identification and Adaptive Control for Micro-Positioning Platform
2025 44th Chinese Control Conference (CCC)Shuhui Bi +4 more
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