Results 61 to 70 of about 37,633 (216)
Novel Microelectromechanical Systems Image Reversal Fabrication Process Based on Robust SU-8 Masking Layers [PDF]
This paper discusses a novel fabrication process that uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems ...
Coutu, Ronald A., Jr. +1 more
core +1 more source
Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu +8 more
wiley +1 more source
Electrolysis-based diaphragm actuators [PDF]
This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy.
Andersen, R. A. +3 more
core +2 more sources
Recent Advances of Slip Sensors for Smart Robotics
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang +8 more
wiley +1 more source
Field tests of a portable MEMS gravimeter [PDF]
Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive.
Bramsiepe, Steven G. +6 more
core +2 more sources
Micromachined Double‐Membrane Mechanically Tunable Metamaterial for Thermal Infrared Filtering
Herein, a mechanically tunable double‐layer plasmonic metamaterial leveraging the extraordinary optical transmission effect observed in subwavelength arrays of openings within thin metal layers is presented. The concept is experimentally validated by integrating the proposed metamaterial structure into an electrostatic parallel‐plate actuator to create
Oleg Bannik +7 more
wiley +1 more source
IntroductionSlip-related falls are a significant concern, particularly for vulnerable populations such as the elderly and individuals with gait disorders, necessitating effective preventive measures.
Nuno Ferrete Ribeiro +8 more
doaj +1 more source
Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity Measurements [PDF]
In this paper, a thermal flow sensor consisting of two or three heated wires, the Microflown, is treated for application to acoustic measurements. It is sensitive to flow ("particle velocity"), contrary to conventional microphones that measure acoustic ...
Elwenspoek, Miko C. +3 more
core +3 more sources
Microfabrication using nano‐ to micron‐sized blocks has transformative potential for next‐gen electronics, optoelectronics, and materials. Traditional methods are limited by scalability and precision. STIC, a single‐laser system for precise colloid manipulation and immobilization using femtosecond lasers, is introduced that enables efficient 3D ...
Krishangi Krishna +4 more
wiley +1 more source
Alzheimer’s disease (AD), a progressive neurodegenerative disorder, is marked by the abnormal production of amyloid-beta (Aβ) fibrils, a key biomarker for diagnosis and illness monitoring. Advanced microfluidic devices, such as brain-on-a-chip (BoC), are
Margarida O. Correia +3 more
doaj +1 more source

