Results 61 to 70 of about 37,633 (216)

Novel Microelectromechanical Systems Image Reversal Fabrication Process Based on Robust SU-8 Masking Layers [PDF]

open access: yes, 2011
This paper discusses a novel fabrication process that uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems ...
Coutu, Ronald A., Jr.   +1 more
core   +1 more source

Transducers Across Scales and Frequencies: A System‐Level Framework for Multiphysics Integration and Co‐Design

open access: yesAdvanced Materials Technologies, EarlyView.
Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu   +8 more
wiley   +1 more source

Electrolysis-based diaphragm actuators [PDF]

open access: yes, 2006
This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy.
Andersen, R. A.   +3 more
core   +2 more sources

Recent Advances of Slip Sensors for Smart Robotics

open access: yesAdvanced Materials Technologies, EarlyView.
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang   +8 more
wiley   +1 more source

Field tests of a portable MEMS gravimeter [PDF]

open access: yes, 2017
Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive.
Bramsiepe, Steven G.   +6 more
core   +2 more sources

Micromachined Double‐Membrane Mechanically Tunable Metamaterial for Thermal Infrared Filtering

open access: yesAdvanced Photonics Research, Volume 6, Issue 5, May 2025.
Herein, a mechanically tunable double‐layer plasmonic metamaterial leveraging the extraordinary optical transmission effect observed in subwavelength arrays of openings within thin metal layers is presented. The concept is experimentally validated by integrating the proposed metamaterial structure into an electrostatic parallel‐plate actuator to create
Oleg Bannik   +7 more
wiley   +1 more source

Unveiling human biomechanics: insights into lower limb responses to disturbances that can trigger a fall

open access: yesFrontiers in Robotics and AI
IntroductionSlip-related falls are a significant concern, particularly for vulnerable populations such as the elderly and individuals with gait disorders, necessitating effective preventive measures.
Nuno Ferrete Ribeiro   +8 more
doaj   +1 more source

Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity Measurements [PDF]

open access: yes, 2005
In this paper, a thermal flow sensor consisting of two or three heated wires, the Microflown, is treated for application to acoustic measurements. It is sensitive to flow ("particle velocity"), contrary to conventional microphones that measure acoustic ...
Elwenspoek, Miko C.   +3 more
core   +3 more sources

Harnessing Ultrafast Optical Pulses for 3D Microfabrication by Selective Tweezing and Immobilization of Colloidal Particles in an Integrated System

open access: yesAdvanced Photonics Research, Volume 6, Issue 5, May 2025.
Microfabrication using nano‐ to micron‐sized blocks has transformative potential for next‐gen electronics, optoelectronics, and materials. Traditional methods are limited by scalability and precision. STIC, a single‐laser system for precise colloid manipulation and immobilization using femtosecond lasers, is introduced that enables efficient 3D ...
Krishangi Krishna   +4 more
wiley   +1 more source

A Proof-of-Concept Study Aiming for the Integration of an Optical Biosensor in Advanced Microfluidic Devices for Alzheimer’s Disease Studies

open access: yesApplied Sciences
Alzheimer’s disease (AD), a progressive neurodegenerative disorder, is marked by the abnormal production of amyloid-beta (Aβ) fibrils, a key biomarker for diagnosis and illness monitoring. Advanced microfluidic devices, such as brain-on-a-chip (BoC), are
Margarida O. Correia   +3 more
doaj   +1 more source

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