Results 291 to 299 of about 49,334 (299)

Barrier layers: Principles and applications in microelectronics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1984
exaly  

The science and engineering of microelectronic fabrication

Choice Reviews Online, 1996
openaire   +1 more source

Vacuum microelectronics: what's new and exciting

IEEE Transactions on Electron Devices, 1991
exaly  

Electron-Beam Technology in Microelectronic Fabrication

1980
openaire   +1 more source

Future of plasma etching for microelectronics: Challenges and opportunities

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Gottlieb S Oehrlein, Jane P Chang, Rémi Dussart   +2 more
exaly  

Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication

Proceedings of the IEEE, 2002
exaly  

The Science and Engineering of Microelectronic Fabrication

Industrial Robot: An International Journal, 2000
openaire   +1 more source

Assessment of Extremely Low Frequency (ELF) Electric and Magnetic Fields in Microelectronics Fabrication Rooms

Journal of Occupational and Environmental Hygiene, 1991
exaly  

1599. Microelectronics technology—a look at fabrication methods

Vacuum, 1967
openaire   +1 more source