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The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (41, 43).
Jaakkola, Antti, Pekko, Panu
openaire
Jaakkola, Antti, Pekko, Panu
openaire

