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Micromechanisms fabrication: a challenge in micromechanics and microelectronics

1992 IEEE International Solid-State Circuits Conference Digest of Technical Papers, 2003
Micromechanisms fall into two broad categories: sensors and actuators. Actuators convert electric energy to mechanical energy, whereas sensors convert physical quantities such as force and pressure to electronic signals. The sensor area, in particular the resonating sensor, appears to have the earmarks of practical applications.
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Micromechanisms

Philosophical Transactions of the Royal Society of London. Series A: Physical and Engineering Sciences, 1995
Abstract Micromechanics deals with micromechanisms which fall into two broad categories: sensors and actuators. Since sensors measure some property of their environment, internal sensor power dissipation should be minimized and sensor sensitivity must be maximized. In force sensing, power dissipation has been reduced by ten decades in
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Micromechanics

2001
Abstract A unidirectional fiber composite (UDC) consists of aligned continuous fibers that are embedded in a matrix. This article describes a variety of analytical methods that are used to determine the various physical properties of the UDC.
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micromechanics

2018
Stephen W. Tsai, H. Thomas Hahn
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A constant-force bistable micromechanism

Sensors and Actuators A: Physical, 2013
Huy-Tuan Pham, Dung-An Wang
exaly  

A tristable compliant micromechanism with two serially connected bistable mechanisms

Mechanism and Machine Theory, 2014
Huy-Tuan Pham, Dung-An Wang
exaly  

MICROMECHANICAL SENSOR

2019
WALDMANN JAN, SCHEBEN ROLF, EID RUDY
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