Results 211 to 220 of about 43,065 (264)
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Japanese Journal of Applied Physics, 1977
A new plasma etching technique using microwave discharge is presented. Silicon wafers are etched by the discharge in a (CF4+O2) gas mixture. Fine patterns with dimensions of 1 µm are etched up to 1 µm in depth without undercutting at a pressure of 5×10-4 Torr with an Al mask having 0.08 µm thickness.
Keizo Suzuki +3 more
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A new plasma etching technique using microwave discharge is presented. Silicon wafers are etched by the discharge in a (CF4+O2) gas mixture. Fine patterns with dimensions of 1 µm are etched up to 1 µm in depth without undercutting at a pressure of 5×10-4 Torr with an Al mask having 0.08 µm thickness.
Keizo Suzuki +3 more
openaire +1 more source
2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014
Cold atmospheric plasmas (CAP) may have the ability to improve cancer treatment, though the mechanisms of which are yet to be fully understood. Recent works have shown that Rayleigh microwave scattering (RMS) can be used to obtain the absolute value of the electron density in CAP. An RMS apparatus titled the Microwave Electron Density Device (MEDD) has
David R. Scott +2 more
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Cold atmospheric plasmas (CAP) may have the ability to improve cancer treatment, though the mechanisms of which are yet to be fully understood. Recent works have shown that Rayleigh microwave scattering (RMS) can be used to obtain the absolute value of the electron density in CAP. An RMS apparatus titled the Microwave Electron Density Device (MEDD) has
David R. Scott +2 more
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Microwave Blood Plasma Defroster
Journal of Microwave Power and Electromagnetic Energy, 1991A microwave blood plasma defroster capable of thawing up to four bags of frozen blood plasma at a time is described. The unit stops automatically when the plasma reaches a preset temperature, and all operating parameters are monitored for safety. Comparative testing showed that blood plasma thawed in this device was indistinguishable from plasma thawed
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2005 Joint 30th International Conference on Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2006
The emissions from transport vehicles have dramatically increased over the last 30 years and huge sums of money are being invested in the reduction of vehicle pollution. The current method for treating these gases is using a catalytic converter, which has a honeycomb of porous ceramic.
M. Houghton +4 more
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The emissions from transport vehicles have dramatically increased over the last 30 years and huge sums of money are being invested in the reduction of vehicle pollution. The current method for treating these gases is using a catalytic converter, which has a honeycomb of porous ceramic.
M. Houghton +4 more
openaire +1 more source
Journal of Applied Physics, 1965
Transmission characteristics of a rectangular waveguide with a perpendicularly inserted mercury-vapor discharge tube, have been measured. The waveguide was excited in the TE01 mode and the plasma column was either perpendicular or parallel to the electric vector of the waveguide mode.
B. Keržar, P. Weissglas
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Transmission characteristics of a rectangular waveguide with a perpendicularly inserted mercury-vapor discharge tube, have been measured. The waveguide was excited in the TE01 mode and the plasma column was either perpendicular or parallel to the electric vector of the waveguide mode.
B. Keržar, P. Weissglas
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Microwave Diagnostics of Plasmas
IEEE Transactions on Nuclear Science, 1964The theory of wave propagation in plasma media where temperature and collision effects are important is formulated by combining the wave equation and Boltzmann's equation for average electron velocity. Usually it is assumed that the electron collision frequency is independent of velocity, but most gases are characterized by a velocity-dependent ...
R. W. Grow, C. C. Johnson, A. S. Jones
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IET Conference on High Power RF Technologies, 2009
A technique has been developed for melting holes in masonry as an alternative to conventional drilling. Microwaves are applied to a tungsten rod inside a section of waveguide, which is terminated by a short circuit. The rod protrudes from the waveguide, via a small hole, and is placed against the masonry to be drilled.
S.R. Wylie, A.I. Al-Shamma'a, A. Shaw
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A technique has been developed for melting holes in masonry as an alternative to conventional drilling. Microwaves are applied to a tungsten rod inside a section of waveguide, which is terminated by a short circuit. The rod protrudes from the waveguide, via a small hole, and is placed against the masonry to be drilled.
S.R. Wylie, A.I. Al-Shamma'a, A. Shaw
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Nature, 1962
A striated r-f discharge in argon was produced by highpower, continuous- wave, 3.4-cm wavelength radiation focused into the central region of a discharge vessel. The conditions are approximates 2 kw source power and 40 to 100 mm Hg argon pressure, and the effects of varying the power and pressure are described. (D.L.C.)
J. ALLISON, A. L. CULLEN, A. ZÁVODY
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A striated r-f discharge in argon was produced by highpower, continuous- wave, 3.4-cm wavelength radiation focused into the central region of a discharge vessel. The conditions are approximates 2 kw source power and 40 to 100 mm Hg argon pressure, and the effects of varying the power and pressure are described. (D.L.C.)
J. ALLISON, A. L. CULLEN, A. ZÁVODY
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Microwave interactions with plasmas
IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science, 1996The physics of EM wave interactions with plasma with and without the confining magnetic field is presented. The plasma resonance enhances the incident field to large local values. The ponderomotive force of these enhanced electric fields create density perturbations.
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1966 International Electron Devices Meeting, 1966
A low-loss, low-noise plasma varactor has been developed. This is a variable microwave reactance produced by means of a low pressure, highly efficient gas discharge. This device compares favorably with ferrite or semiconductor devices as far as rf losses and average rf power handling capability are concerned. A low-loss phase shifter has been developed
J.Y. Wada, R.C. Knechtli, B.J. Forman
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A low-loss, low-noise plasma varactor has been developed. This is a variable microwave reactance produced by means of a low pressure, highly efficient gas discharge. This device compares favorably with ferrite or semiconductor devices as far as rf losses and average rf power handling capability are concerned. A low-loss phase shifter has been developed
J.Y. Wada, R.C. Knechtli, B.J. Forman
openaire +1 more source