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Overlay measurement by angle resolved Mueller polarimetry
SPIE Proceedings, 2011The use of optical metrology techniques for process control is now widespread. These techniques are fast and nondestructive, allowing higher throughputs than non-optical techniques like electron microscopies or AFM. We present here new developments using complete Mueller polarimetry in the back focal plane of a microscope objective to characterize ...
Clément Fallet +5 more
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Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry
SPIE Proceedings, 2008Light depolarization occurs whenever different polarization responses add up incoherently, as it may be the case with inhomogeneous samples. The most convenient technique to characterize such samples is Mueller matrix polarimetry, as it is the only one providing all the relevant information in presence of depolarization.
M. Foldyna +5 more
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Mueller Matrix Polarimetry for Characterization of Skin Tissue Samples: A Review
Photodiagnosis and Photodynamic Therapy, 2020Iftikhar Ahmad, Ahmar Khaliq, Muaz Iqbal
exaly
Angular-Based Mueller Matrix Polarimetry Parameters for Subwavelength Pore Size Differentiation
Frontiers in Physics, 2022Shuqing Sun, Chuhui Wang, Jiachen Wan
exaly