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2012
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures ...
Minami Yoda +109 more
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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures ...
Minami Yoda +109 more
openaire +2 more sources
2004
Abstract I do not Jike to think of myself as old, but, in the time it has taken me to grow up, an industry which dominates our world has itself grown to maturity from virtually nothing. That industry is of course the personal computer industry, and the technology on which it is based, in its modern form, is the integrated circuit ...
Palasantzas, G. +2 more
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Abstract I do not Jike to think of myself as old, but, in the time it has taken me to grow up, an industry which dominates our world has itself grown to maturity from virtually nothing. That industry is of course the personal computer industry, and the technology on which it is based, in its modern form, is the integrated circuit ...
Palasantzas, G. +2 more
openaire +3 more sources
Nanofabrication for Nanophotonics
ACS NanoNanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences ...
Younghwan Yang +72 more
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2003
In this the 50th anniversary year of the AVS and the AVS Symposium, this article is offered as one in a series of topical review articles to celebrate the role of this community to the progress in nanofabrication technology. The emphasis of the article is on the principles and limits of the various pattern formation techniques which have emerged as ...
Christie R. K. Marrian +1 more
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In this the 50th anniversary year of the AVS and the AVS Symposium, this article is offered as one in a series of topical review articles to celebrate the role of this community to the progress in nanofabrication technology. The emphasis of the article is on the principles and limits of the various pattern formation techniques which have emerged as ...
Christie R. K. Marrian +1 more
openaire +1 more source
Physics Today, 1990
A decade ago the fabrication and study of electron devices whose smallest features were just under 1 micron in size represented the forefront of the field. Today that forefront has moved down an order of magnitude to 100 nanometers, engendering new terminology based on the prefix nano, from the Greek word for dwarf: “nanoscale devices ...
Henry I. Smith, Harold G. Craighead
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A decade ago the fabrication and study of electron devices whose smallest features were just under 1 micron in size represented the forefront of the field. Today that forefront has moved down an order of magnitude to 100 nanometers, engendering new terminology based on the prefix nano, from the Greek word for dwarf: “nanoscale devices ...
Henry I. Smith, Harold G. Craighead
openaire +1 more source
Nanofabrication beyond Electronics
ACS Nano, 2009This Nano Focus article reviews recent developments in nanofabrication based on invited talks given at the "Chemical Methods of Nanofabrication" symposium, which was organized by the authors and presented at the 237th ACS National Meeting and Exhibition as one of seven symposia within the meeting theme, "Nanoscience: Challenges for the Future".
YuHuang, Wang +2 more
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Chem. Soc. Rev., 2009
Nanofabrication, or the organizational control over matter at the nanometre scale, is an intriguing scientific challenge requiring multidisciplinary tools for its solution. DNA is a biomolecule that can be combined with other nanometre-scale entities through chemical self-assembly to form a broad variety of nanomaterials.
Héctor A, Becerril, Adam T, Woolley
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Nanofabrication, or the organizational control over matter at the nanometre scale, is an intriguing scientific challenge requiring multidisciplinary tools for its solution. DNA is a biomolecule that can be combined with other nanometre-scale entities through chemical self-assembly to form a broad variety of nanomaterials.
Héctor A, Becerril, Adam T, Woolley
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Microscopy Research and Technique, 2007
AbstractBeyond its biological importance, short DNA sequences are of increasing interest as excellent and versatile building blocks, in material science and nanotechnology. DNA nanotechnology has been rapidly developed and has branched into several significantly different directions. Controlling DNA nanostructures is one of the most important branches,
Yu, He +7 more
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AbstractBeyond its biological importance, short DNA sequences are of increasing interest as excellent and versatile building blocks, in material science and nanotechnology. DNA nanotechnology has been rapidly developed and has branched into several significantly different directions. Controlling DNA nanostructures is one of the most important branches,
Yu, He +7 more
openaire +2 more sources