Results 41 to 50 of about 27,096 (279)
Light: Science & Applications, 2020 Advanced kirigami/origami provides an automated technique for modulating the mechanical, electrical, magnetic and optical properties of existing materials, with remarkable flexibility, diversity, functionality, generality, and reconfigurability.
Shan-Shan Chen +4 more
semanticscholar +1 more source
X-Ray Lithography for Nanofabrication: Is There a Future?
Frontiers in Nanotechnology, 2022 X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons.
Amardeep Bharti +2 more
semanticscholar +1 more source
Patterned self-assembled monolayers on silicon oxide prepared by nanoimprint lithography and their applications in nanofabrication [PDF]
, 2005 Nanoimprint lithography (NIL) is used as a tool to pattern self-assembled monolayers (SAMs) on silicon substrates because of its ability to pattern in the micrometer and nanometer ranges.
Mahalingam, V. +4 more
core +1 more source
Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding
Nature CommunicationsNanofabrication in silicon, arguably the most important material for modern technology, has been limited exclusively to its surface. Existing lithography methods cannot penetrate the wafer surface without altering it, whereas emerging laser-based ...
Rana Asgari Sabet +4 more
semanticscholar +1 more source
Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications [PDF]
, 2009 A new nanofabrication scheme is presented to form stamps useful in thermal nanoimprint lithography (T-NIL). The stamp is created in single crystalline silicon using a full-wet etching procedure including local oxidation of silicon (LOCOS) and employing ...
Elwenspoek, Michael Curt +10 more
core +1 more source
Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization
Nature Communications, 2019 Two photon polymerization (TPP) allows nanofabrication of three dimensional objects with complex geometries, but is considered to be slow with a limited fabrication rate.
Qiang Geng +3 more
doaj +1 more source
Plasma-Aided Nanofabrication : From Plasma Sources to Nanoassembly
, 2007 In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma ...
Ostrikov, Kostya, Xu, Shuyan
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3D Nanofabrication via Directed Material Assembly: Mechanism, Method, and Future
Advances in MaterialsFabrication of complex three‐dimensional (3D) structures at nanoscale is the core of nanotechnology, as it enables the creation of various micro‐/nano‐devices such as micro‐robots, metamaterials, sensors, photonic devices, etc.
Songyun Gu +4 more
semanticscholar +1 more source
Challenges in nanofabrication for efficient optical metasurfaces
Scientific Reports, 2021 Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on ...
Adelin Patoux +8 more
semanticscholar +1 more source
Plasma-aided nanofabrication: "plasma-building block" approach
, 2006 Unique features and benefits of the plasma-aided nanofabrication are considered by using the "plasma-building block" approach, which is based on plasma diagnostics and nanofilm characterization, cross-referenced by numerical simulation of generation and ...
Ostrikov, K., Xu, S.
core +1 more source