Results 211 to 214 of about 11,900 (214)

Advances in Patterning Materials for 193 nm Immersion Lithography

Chemical Reviews, 2010
exaly  

Extreme ultraviolet lithography

Nature Reviews Methods Primers
exaly  

Nanoimprint Lithography for Nanomanufacturing

2019
openaire   +1 more source

UV curing Nanoimprint Lithography

2007
Voisin, P., Jouve, A., Zelsmann, M., Gourgon, C., Boussey-Said, J.   +4 more
openaire   +1 more source