Results 1 to 10 of about 21,079 (276)

Nanolithography

Definitions, 2013
Nanolithography is the branch of nanotechnology concerned with the study and application of the nanofabrication of nanometer-scale structures, meaning nanopatterning with at least one lateral dimension between the size of an individual atom and ...
Venugopal, Gunasekaran, Kim, Sang-Jae
semanticscholar   +5 more sources

Two-dimensional Nanolithography Using Atom Interferometry [PDF]

, 2004
We propose a novel scheme for the lithography of arbitrary, two-dimensional nanostructures via matter-wave interference. The required quantum control is provided by a pi/2-pi-pi/2 atom interferometer with an integrated atom lens system.
A. C. Doherty, A. Corney, A. Gangat, B. E. A. Saleh, G. Pati, Joseph W. Goodman, L. Allen, M. S. Shahriar, P. Meystre, P. Pradhan   +9 more
core   +2 more sources

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Nature Communications, 2020
Extreme ultraviolet (EUV) light is entering use in nanolithography. Here the authors discuss experimental and theoretical results about the prominent role of multiply-excited states in highly charged tin ions in the mechanism of EUV light emission from ...
F. Torretti, J. Sheil, R. Schupp, M. M. Basko, M. Bayraktar, R. A. Meijer, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato, A. J. Neukirch, J. Colgan   +11 more
doaj   +2 more sources

Advanced optical nanolithography by enhanced transmission through bull’s eye nanostructured meta-mask [PDF]

Nanophotonics, 2023
Plasmonic optical nanolithography using extraordinary optical transmission through a metallic nanohole mask has been actively applied to the high-resolution fabrication of nanostructures over a large area.
Kim Taeyeon, Ahn Heesang, Kim Soojung, Song Hyerin, Choi Jong-ryul, Kim Kyujung   +5 more
doaj   +2 more sources

The Nanolithography Toolbox

Journal of Research of the National Institute of Standards and Technology, 2016
This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab ...
Balram, Krishna C., Westly, Daron A., Davanço, Marcelo, Grutter, Karen E., Li, Qing, Michels, Thomas, Ray, Christopher H., Yu, Liya, Kasica, Richard J., Wallin, Christopher B., Gilbert, Ian J., Bryce, Brian A., Simelgor, Gregory, Topolancik, Juraj, Lobontiu, Nicolae, Liu, Yuxiang, Neuzil, Pavel, Svatos, Vojtech, Dill, Kristen A., Bertrand, Neal A., Metzler, Meredith G., Lopez, Gerald, Czaplewski, David A., Ocola, Leonidas, Srinivasan, Kartik A., Stavis, Samuel M., Aksyuk, Vladimir A., Alexander Liddle, J., Krylov, Slava, Robert Ilic, B.   +29 more
openaire   +5 more sources

Three-dimensional femtosecond laser nanolithography of crystals [PDF]

Nature Photonics, 2019
Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching reactivity of
A Banerjee, Airán Ródenas, Ajoy K. Kar, DE Zelmon, DR Smith, E Yablonovitch, EG Gamaly, EN Glezer, G Zhou, Giacomo Corrielli, J Basterfield, J Bauer, J Fischer, J Schindelin, JC Knight, JD Joannopoulos, JG Rarity, JK Gansel, JM Dudley, K Jain, K McGarvey-Lechable, LR Meza, M Deubel, M Hermatschweiler, M Straub, MD Henry, Min Gu, P Russell, Petra Paiè, RA Shelby, RJA Francis-Jones, Roberto Osellame, S John, S Juodkazis, S Juodkazis, S Maruo, S Wong, Sajeev John, T Clausnitzer, TJ Kippenberg   +39 more
core   +4 more sources

Understanding photoacoustic signal formation in the presence of transparent thin films [PDF]

Photoacoustics
Strain-induced variation of the refractive index is the main mechanism of strain detection in photoacoustic experiments. However, weak strain-optic coupling in many materials limits the application of photoacoustics as an imaging tool.
Maksym Illienko, Matthias C. Velsink, Stefan Witte   +2 more
doaj   +2 more sources

Information advantage in sensing revealed by Fano-resonant Fourier scatterometry [PDF]

Nature Communications
Fano resonances in nanophotonic structures are attractive for sensing due to their ultanarrow resonant linewidths and high local fields. Conventional read out schemes rely on measuring a frequency shift in Fano scattering spectra as function of ...
Nick Feldman, Arie J. den Boef, Lyubov V. Amitonova, A. Femius Koenderink   +3 more
doaj   +2 more sources

Photonic crystal hydrogels based on highly reproducible molding method [PDF]

Scientific Reports
A lot of sensors using structural color are based on periodic nanostructures, or photonic crystals. So the nanostructures need to be fabricated with high reproducibility so that those sensors can be suitable for practical and commercial applications ...
Jingyeong Kim, Nguyen Hoang Minh, Da-In Kwon, Kwanoh Kim, Do Hyun Kang, Yeong-Eun Yoo, Jae Sung Yoon   +6 more
doaj   +2 more sources

Femtosecond laser direct nanolithography of perovskite hydration for temporally programmable holograms. [PDF]

Nat Commun
Modern nanofabrication technologies have propelled significant advancement of high-resolution and optically thin holograms. However, it remains a long-standing challenge to tune the complex hologram patterns at the nanoscale for temporal light field ...
Zhang Y, Zhu S, Hu J, Gu M.
europepmc   +2 more sources