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Applications of dip-pen nanolithography
Nature Nanotechnology, 2007The ability to tailor the chemical composition and structure of a surface at the sub-100-nm length scale is important for studying topics ranging from molecular electronics to materials assembly, and for investigating biological recognition at the single biomolecule level.
Chad A. Mirkin +2 more
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Resist Materials and Nanolithography [PDF]
MRS Proceedings, 1999 AbstractThe work focuses on lithographic processes and materials for sub-50 nm lithography. Lithographic results of polymethyl methacrylates of molecular weights of 50,000, 100,000, 496,000, and 950, 000 are compared. It was found that the molecular weight and developer concentration do not affect smallest linewidth, within experimental error. However,
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Optothermoplasmonic Nanolithography for On‐Demand Patterning of 2D Materials
Advanced Functional Materials, 2018Since the first discovery of graphene, 2D materials are drawing tremendous attention due to their atomic thickness and superior properties. Fabrication of high‐quality micro‐/nanopatterns of 2D materials is essential for their applications in both ...
Linhan Lin +11 more
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Self-Aligned Nanolithography in a Nanogap
Nano Letters, 2009A self-aligned nanolithography approach is reported to form a nanoscale via hole in a nanogap. Field emission between two opposite electrodes of a nanogap is used to expose the polymer resist within the nanogap region. A via hole pattern forms in the nanogap area after the exposure process.
Yung-Chen Lin, Jingwei Bai, Yu Huang
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Photosensitive metamaterial for nanolithography
2014 International Conference on Optical MEMS and Nanophotonics, 2014This work presents the novel photosensitive metamaterial (metaphotoresist) with silver (Ag) and dielectric multilayer for ultraviolet nanolithography overcoming a diffraction limit. The metamaterial consists of multilayer with Ag and photoresist (PR) layers.
Sang-Gil Park +3 more
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Nanoapertures without Nanolithography
ACS Photonics, 2018We propose and experimentally demonstrate the implementation of lithography-free nanoapertures on optical fibers.
Alessandro Tuniz +5 more
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Micrometer to 15 nm Printing of Metallic Inks with Fountain Pen Nanolithography.
Small, 2018The field of printed electronics is continually trying to reduce the dimensions of the electrical components. Here, a method of printing metallic lines with widths as small as 15 nm and up to a few micrometers using fountain pen nanolithography (FPN) is ...
Talia Yeshua +5 more
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Nanotechnologies and nanolithography in Europe
SPIE Proceedings, 2002European microelectronics industry recovered a strong position within last years, thanks in part to large cooperative programs involving both national and European funding. But, keeping in-line with Moore's law, entering the nano-era requires an increasingly effort in research and development.
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SPM nanolithography of hydroxy-silicates
Nanotechnology, 2012Bio-nanopatterning of surfaces is becoming a crucial technique with applications ranging from molecular and cell biology to medicine. Scanning probe microscopy (SPM) is one of the most useful tools for nanopatterning of flat surfaces. However, these patterns are usually built on homogeneous surfaces and require chemical functionalization to ensure ...
VALDRE', GIOVANNI +3 more
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Optimized design of block copolymers with covarying properties for nanolithography
Nature Materials, 2022H. Feng +13 more
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