High Harmonic Generation driven Extreme Ultraviolet 0th order Scatterometry for Nanostructure Characterization [PDF]
We introduce a tabletop high harmonic generation (HHG) scatterometry technique to extract structural and material characteristics of periodic nanostructures. Grazing incidence reflection scatterometry enables fast and robust measurements of linewidth and
Corazza Francesco+6 more
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Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology
The fabrication of nanostructures with high resolution and precise control of the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process.
Javier Pablo-Navarro+3 more
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High-speed computational imaging with path-corrected fly-scan ptychography [PDF]
Ptychography is a powerful computational imaging technique that reconstructs both the complex object function and the illumination probe from overlapping diffraction patterns.
Karpavičius Augustas+2 more
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Multimode fiber ruler for detecting nanometric displacements
Light is a perfect tool for numerous metrology applications. To deliver light to hard-to-reach places, fiber probes are widely used. Hair-thin endoscopes based on multimode fibers offer exceptional performance in terms of information density and ...
Ksenia Abrashitova, Lyubov V. Amitonova
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Soft Nanolithography by Polymer Fibers [PDF]
AbstractWe report on the use of polymer fibers for large‐area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increases the achieved resolution during pattern ...
D Tu+6 more
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Localized Photoactuation of Polymer Pens for Nanolithography
Localized actuation is an important goal of nanotechnology broadly impacting applications such as programmable materials, soft robotics, and nanolithography. Despite significant recent advances, actuation with high temporal and spatial resolution remains
Zhongjie Huang+5 more
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Colloidal Quantum Dot Nanolithography: Direct Patterning via Electron Beam Lithography
Micro/nano patterns based on quantum dots (QDs) are of great interest for applications ranging from electronics to photonics to sensing devices for biomedical purposes.
Taewoo Ko+4 more
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Thermal scanning probe lithography using Parylene C as thermal resist
Thermal scanning probe lithography is a direct‐write patterning method that uses a heated scanning probe tip to remove thermal resist. The most widely used thermal resist is polyphthalaldehyde. Another alternative thermal resist, Parylene C is introduced
Yun Jiang+4 more
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Spatial coherence control and analysis via micromirror-based mixed-state ptychography
Flexible and fast control of the phase and amplitude of coherent light, enabled by digital micromirror devices (DMDs) and spatial light modulators, has been a driving force for recent advances in optical tweezers, nonlinear microscopy, and wavefront ...
Ruslan Röhrich+3 more
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Alternative Masks for Nanolithography [PDF]
The use of masks coming from research field as different as colloids, polymers or nanomaterials is a recently emerging field. Recent advances in this area have developed a variety of practical routes which have a great potential to overcome or at least complete the high-cost lithographic techniques.
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