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Nanometrology for industrial applications

e & i Elektrotechnik und Informationstechnik, 1998
The development of continuously decreasing workpiece tolerances lies in one line with the perspective of nanotechnology. To fulfil metrological demands since about 1982 new high resolution and high precision measuring devices have been developed. These are computerized instruments and the measuring results are very illustrative figures of tested ...
D. Prostrednik, P. H. Osanna
openaire   +1 more source

Particle generated spectral interferences in single particle ICP-MS: a roadblock to accurate nanometrology

Journal of Analytical Atomic Spectrometry
Ion clouds from ablated nanoparticles form spectral interferences in a manner similar to their dissolved counterparts. This study investigates the formation of such interferences, and presents strategies for their mitigation.
A. Goodman   +3 more
semanticscholar   +1 more source

Uncertainty‐Aware Bayesian Computational Imaging for Single‐Shot Widefield Interferometric Nanometrology

Laser & Photonics Reviews
Widefield interferometry offers non‐destructive, scalable nanometrology for semiconductor photonics, but prevailing pipelines require multi‐frame scanning (or phase‐shifting) and postprocessing of reconstructed noise‐limited phase, and do not provide ...
Damian Suski   +7 more
semanticscholar   +1 more source

Dimensional nanometrology at PTB

2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings, 2012
Dimensional metrology for micro- and even nanometer-sized objects is becoming increasingly important in industry branches like semiconductor and optical industries as well as in the fields of mechanical engineering, biology and medicine. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed in ...
H.-U. Danzebrink   +6 more
openaire   +1 more source

A probing system with a rotatable tip for 3D coordinate nanometrology

Measurement science and technology, 2020
Performing coordinate nanometrology of arbitrarily shaped three-dimensional (3D) objects about a micrometer or less in size remains a challenge. In this paper we report a probing system with a rotatable tip for performing coordinate metrology on such ...
G. Jayanth, R. Sri Muthu Mrinalini
semanticscholar   +1 more source

Nanometrology

Proceedings of the International School of Physics “Enrico Fermi”
1 ...
openaire   +1 more source

Nanometrology at the PTB

Metrologia, 1991
The Physikalisch-Technische Bundesanstalt (PTB) is engaged in a range of projects which call for dimensional precision of order 1 nm. These include research and development (i) to improve linear and angular displacement metrology; (ii) to investigate the physical interaction of high resolution probes with technical surfaces and microstructures and so ...
openaire   +1 more source

Nanometrology

Measurement Science and Technology, 2010
Mitsuru Tanaka   +2 more
openaire   +2 more sources

Nanometrology at the IMGC

2005
A survey of the nanometrology-related activities in progress at the Istituto di Metrologia “G. Colonnetti” (IMGC) is presented. Some special apparatus for critical measurements in the nanoscale range are described. The development of instrumentation and methods for quantitative scanning probe microscopy, optical diffractometry, and atomic scale ...
BISI, MARCO   +4 more
openaire   +1 more source

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