Results 221 to 222 of about 4,233 (222)
Some of the next articles are maybe not open access.
Fundamental Principles of Engineering Nanometrology
2010
openaire
copy doi
(10.1016/c2009-0-20339-4)
openaccessbutton.org (pdf)
+1 more source
Developments in nanometrology at IPL
2007
DE CHIFFRE L
, HANSEN H. N, BARIANI P, HORSEWELL A, MARINELLO, FRANCESCO, SAVIO, ENRICO, CARLI L.
+6 more
openaire
hdl.handle.net
+1 more source
interferometry
nanopositioning
angle measurement
second harmonic generation
mems
absolute distance measurement
afm
femtosecond laser
chromatic confocal probe
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