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Linear and traceable scales for nanometrology: Dissertation

2014
Methods for the implementation of reliable, repeatable scales are central to all measurementtechniques. Laser interferometers and diffractometers can be used for accurate dimensionalmeasurements that are readily traceable to the definitions of the SI (Système International) units.
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Nanometrology

Smart Materials Bulletin, 2002
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Nanometrology - The Frontier of Precision

2005
Nanotechnology, the engineering that deals with the production of systems whose tolerances lie in the domain of nanometers, is becoming increasingly important in many industrial fields. In order that nanotechnology create viable, commercial products, ultra-precision metrology will be required.
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Nanometrology

Contemporary Physics, 2008
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Nanometrology

Measurement Science and Technology, 2005
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3D Nanomanufacturing and Nanometrology

2017
Further scaling and miniaturization of nanodevices (nanoelectronics, Quantum devices bio-nano devices for healthcare) brings major manufacturing, metrology and characterization challenges that cannot be met anymore by current techniques. The High Volume Manufacturing industry requires, more than ever, metrology methods that routinely measure structural
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Optical Nanometrology

Journal of the Society of Mechanical Engineers, 1992
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