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Linear and traceable scales for nanometrology: Dissertation
2014Methods for the implementation of reliable, repeatable scales are central to all measurementtechniques. Laser interferometers and diffractometers can be used for accurate dimensionalmeasurements that are readily traceable to the definitions of the SI (Système International) units.
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Nanometrology - The Frontier of Precision
2005Nanotechnology, the engineering that deals with the production of systems whose tolerances lie in the domain of nanometers, is becoming increasingly important in many industrial fields. In order that nanotechnology create viable, commercial products, ultra-precision metrology will be required.
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Recent progress in optical nanometrology for the semiconductor industry
Measurement: SensorsL. Šiaudinytė, Poul-Erik Hansen
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3D Nanomanufacturing and Nanometrology
2017Further scaling and miniaturization of nanodevices (nanoelectronics, Quantum devices bio-nano devices for healthcare) brings major manufacturing, metrology and characterization challenges that cannot be met anymore by current techniques. The High Volume Manufacturing industry requires, more than ever, metrology methods that routinely measure structural
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