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Optical Methods for Dimensional Metrology in Production Engineering
CIRP Annals, 2002Abstract Metrology in production engineering must be fast, accurate, robust and automated, and ideally integrated into the production line. In many respects, optical methods seem to fulfil these requirements. Although optical methods have a long tradition in dimensional metrology, the rapid progress in the development of optoelectronic components and
Heinrich Schwenke +3 more
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Non-contact measurement technique for dimensional metrology using optical comb
Measurement, 2016Abstract This paper proposes a non-contact pulsed interferometer for dimensional metrology using the repetition frequency of an optical frequency comb. A compact absolute-length measuring system is established for practical non-contact measurement based on a single-mode fiber interferometer. The stability and accuracy of the measurements are compared
Wiroj Sudatham +3 more
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Model-based dimensional optical metrology
Optics and Photonics for Advanced Dimensional Metrology, 2020Model based approaches in dimensional metrology have great potential in terms of better accuracy. In some cases they may even help to overcome classical resolution criteria. A famous example is optical scatterometry for measuring critical dimensions on semiconductor chips in the tenth-nanometer range. Basically, these techniques rely on the solution of
Jörg Bischoff +3 more
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SPIE Proceedings, 2012
There has been much recent work in developing advanced optical metrology applications that use imaging optics for critical dimension measurements, defect detection and for potential use with in-die metrology. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions of sub-wavelength features or when imaging defects
Richard M. Silver +5 more
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There has been much recent work in developing advanced optical metrology applications that use imaging optics for critical dimension measurements, defect detection and for potential use with in-die metrology. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions of sub-wavelength features or when imaging defects
Richard M. Silver +5 more
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Automated High-Dynamic-Range Three-Dimensional Optical Metrology Technique
Volume 1: Materials; Micro and Nano Technologies; Properties, Applications and Systems; Sustainable Manufacturing, 2014Measuring three-dimensional (3D) surfaces with extremely high contrast (e.g., partially shiny surfaces) is extremely difficult with optical metrology methods. Conventional techniques, which involve measurement from multiple angles or camera aperture adjustments, pose issues for high accuracy measurement in the manufacturing industry because they are ...
Laura Ekstrand, Song Zhang
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Metrological Limitations of Optical Probing Techniques for Dimensional Measurements
CIRP Annals, 1995Abstract Based on experimental results from a series of investigations, this paper deals with the metrological limitations of optical probing techniques in the field of dimensional metrology. The optical probing systems considered herein comprise an optical coordinate measuring machine, an experimental optical roundness tester and an optical ...
L. De Chiffre, H.N. Hansen
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Optical three-dimensional metrology with structured illumination
Optical Engineering, 2011A variety of techniques have been developed to measure the three-dimensional shape of an object using structured illumination. The measurement of objects with diffusely reflecting surfaces by means of projected patterns can be considered a standard technique.
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Combined optical and X–ray interferometry for high–precision dimensional metrology
Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, 2000The requirement for calibrating transducers having subnanometre displacement sensitivities stimulated the development of an instrument in which the displacement is measured by a combination of optical and X–ray interferometry. The need to combine both types of interferometry arises from the fact that optical interferometry enables displacements ...
Basile G +13 more
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Latest optical methods for industrial dimensional metrology
SPIE Proceedings, 2005Applying optical methods to a simple inspection problem, such as the presence or absence of an assembly component, is likely the least restrictive of any machine vision application. The setup, alignment, and components can be made very simply by using any feature which appears different if the component of interest is present.
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