Results 191 to 200 of about 38,344 (233)

Three-dimensional optical metrology with color-coded extended depth of focus

Optics Letters, 1999
A novel method of rapid three-dimensional optical metrology that is based on triangulation of a configuration of color-coded light stripes is presented. The method exploits polychromatic illumination and a combined diffractive-refractive element, so the incident light is focused upon a stripe that is axially dispersed, greatly increasing the depth ...
E, Hasman, S, Keren, N, Davidson, A A, Friesem   +3 more
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Fabrication of optical fiber probes for nanometer-scale dimensional metrology

Review of Scientific Instruments, 1994
The fabrication of cylindrical probes having diameters as small as 50 nm is described in this article. The planar endface (advantageously oriented perpendicular to the axis of the cylindrical probe) and sharp 90° corners of the end portion of the probe enable accurate measurement of a feature being scanned, even at sudden jumps in the surface.
H. M. Marchman, J. E. Griffith, R. W. Filas   +2 more
openaire   +1 more source

Characterization of CCD cameras and optics for dimensional metrology

AIP Conference Proceedings, 2001
Optical semiconductor characterization and metrology rely heavily on digital camera imaging and its associated optical imaging systems. This work characterizes the performance of a widely used, commercially available camera and compares its performance to that of a state of the art digital camera.
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Fibre optics for metrology in nuclear research reactors applications to dimensional measurements

2009 1st International Conference on Advancements in Nuclear Instrumentation, Measurement Methods and their Applications, 2009
In-situ measurement is a key issue for advanced irradiation programs in nuclear research reactors, especially in Material Testing Reactors (MTR). In that prospect, Optical Fiber Sensors (OFS) can feature unique intrinsic properties that bring substantial advantages over conventional sensing approaches. One of the objectives of the Joint Instrumentation
G. Cheymol, B. Brichard, J. F. Villard
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Optical dimensional metrology for 3D objects of constant thickness

Measurement, 2001
Application of classical optical dimensional methods using the shadow (projecting) image models for 3D bodies, in practice, can lead to significant errors. Since the existing solutions for diffraction and image problems of 3D bodies of constant thickness are extremely difficult for engineering applications, we suggested for calculation of Fraunhofer ...
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Handbook of Optical Dimensional Metrology

2016
Optical Metrology: Introduction Optical Metrology Overview, Kevin Harding Machine Vision for Metrology, Kevin Harding and Gil Abramovich Optical Metrology of Larger Objects Laser Tracking Systems, Scott Sandwith and Stephen Kyle Displacement Measuring Interferometry, Vivek G. Badami and Peter J. de Groot Metrology of Large Parts, H.
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Accuracy of Optical Dimensional Metrology at the Nano-scale

Microscopy and Microanalysis, 2008
Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7 ...
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Dimensional metrology on a semiconductor packaging process using an optical comb

SPIE Proceedings, 2014
With the advent of smart devices, the semiconductor packaging process has been proposed to realize devices that have high performance devices and compact size. Several silicon wafers are stacked vertically to create 3 dimensional devices with a high degree of integration.
Jungjae Park, Jonghan Jin, Saerom Maeng
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Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2012
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data ...
SENIN, Nicola, Blunt L. A., Tolley M.
openaire   +2 more sources

Dimensional metrology of large refractive optical components using nonoptical techniques

SPIE Proceedings, 2002
Traditionally, the key component design parameters such as radius, lens thickness, size and shape of most types of optical components are measured using optical techniques. There are several reasons for this, but in particular: the form of the entire surface is generally revealed in one testing set up, the optical functionality of the component is ...
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