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Novel techniques for random depth access three-dimensional white-light optical metrology
SPIE Proceedings, 2006Digital stepping is desirable in optical metrology--operation is simple, absolute position is known, and random regions of interest can be skipped to, rapidly and accurately. However, in white-light interferometry, analog scanning has traditionally been employed because, in one operation, it achieves depth scanning of a sample and an electronically ...
Patrick Egan +3 more
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2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020
Using only two derived numbers based on a reference library, this paper shows how through-focus scanning optical microscopy (TSOM) is compatible with computational process control (CPC) for the complete 3Dshape process monitoring of nanoscale to microscale targets.
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Using only two derived numbers based on a reference library, this paper shows how through-focus scanning optical microscopy (TSOM) is compatible with computational process control (CPC) for the complete 3Dshape process monitoring of nanoscale to microscale targets.
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Error reduction in three-dimensional metrology combining optical and touch probe data
SPIE Proceedings, 2010Analysis of footwear under the Harmonized Tariff Schedule of the United States (HTSUS) is partly based on identifying the boundary ("parting line") between the "external surface area upper" (ESAU) and the sample's sole. Often, that boundary is obscured. We establish the parting line as the curved intersection between the sample outer surface and its
Janice R. Gerde +1 more
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Dimensional metrology using the optical comb of a mode-locked laser
Measurement Science and Technology, 2015In the field of dimensional metrology, significant technical challenges have been encountered with regard to large-scale object assembly, satellite positioning, control of the long-distance precision stage, and inspections of large steps or deep holes on semiconductor devices and multi-layered display panels.
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Dimensional metrology for smart devices using the optical comb of femtosecond pulse lasers
2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015We have proposed the dimensional metrological methods for smart devices using the optical comb of a femtosecond pulse laser. For precision and high speed measurements, these methods were realized based on spectral-domain interferometry.
Jonghan Jin +3 more
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A Sensor for Dimensional Metrology with an Interferometer in Integrated Optics Technology
Measurement, 1989Abstract For the purpose of dimensional metrology the application of an interferometer is well known. For a wide application of this method, size and cost of the necessary instruments have to be reduced significantly. Our solution to this demand was the development of an interferometer using the technology of integrated optics on silicon with the aid
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Optical metrology techniques for dimensional stability measurements
2010This thesis work is optical metrology techniques to determine material stability. In addition to displacement interferometry, topics such as periodic nonlinearity, Fabry-Perot interferometry, refractometry, and laser stabilization are covered.
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A first review of optical edge-diffraction technology for precision dimensional metrology
The International Journal of Advanced Manufacturing Technology, 2019A comprehensive study relevant to displacement sensing techniques based on optical edge-diffraction has been first introduced in academic society. Dimensional sensors with nanometer resolution are key components of many precision imaging, positioning, and fabrication machines.
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COXI - A Combined Optical and X-ray Interferometer for high precision dimensional metrology
1993COXI is an instrument under development, combining x-ray and optical interferometry, for the measurement of displacements over a range of 10 micrometres with an accuracy of a 10 picometres and over a range of 1 millimetre with an accuracy of 100 picometres.
G Basile +11 more
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