Results 11 to 20 of about 69,644 (326)
Maskless exposure device for photolithography [PDF]
, 2010 Photolithography plays a consequential role in transferring patterns from photomasks to substrates and thereby is an important tool in semiconductor, IC, MEMS and many microstructures’ production. The photomasks are preprinted prior to the photolithographic procedure with certain layouts, and these layouts are transferred to surfaces of materials like ...
Dhanesh Kattipparambil Rajan
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Photolithography on Three Dimensional Substrates [PDF]
56th Electronic Components and Technology Conference 2006, 2006 Photolithography is the primary technique for patterning planar substrates. However, some higher-density packaging solutions require tine features to be patterned onto grossly non-planar substrates, for example, in mechanical, optical and fluidic microsystems and packaging schemes.
P.A. Ivey +5 more
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Polymer brush hypersurface photolithography [PDF]
Nature Communications, 2020 AbstractPolymer brush patterns have a central role in established and emerging research disciplines, from microarrays and smart surfaces to tissue engineering. The properties of these patterned surfaces are dependent on monomer composition, polymer height, and brush distribution across the surface. No current lithographic method, however, is capable of
Alexa M. Wong +9 more
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Modeling of microsphere photolithography
Optics Express, 2020 Microsphere photolithography (MPL) is a fabrication technique that combines the ability to self-assemble arrays of microspheres with the ability of a microsphere to focus light to a photonic jet, in order to create highly ordered nanoscale features in photoresist.
Chuang Qu, Chen Zhu, Edward C. Kinzel
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Sensors, 2022 Polyimide is an emerging and very interesting material for substrate and passivation of neural probes. However, the standard curing temperature of polyimide (350 °C) is critical for the microelectrodes and contact pads of the neural probe, due to the ...
João R. Freitas +5 more
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Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask
Micromachines, 2019 This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale.
Chun-Ying Wu, Heng Hsieh, Yung-Chun Lee
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Red and Green Quantum Dot Color Filter for Full-Color Micro-LED Arrays
Micromachines, 2022 This work demonstrated color-conversion layers of red and green quantum dots color filter for full-color display arrays. Ligands exchange using (3-glycidyloxypropyl) trimethoxysilane with epoxy functional groups to treat QDs in the liquid phase was ...
Bingxin Zhao +7 more
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Acoustics-Actuated Microrobots
Micromachines, 2022 Microrobots can operate in tiny areas that traditional bulk robots cannot reach. The combination of acoustic actuation with microrobots extensively expands the application areas of microrobots due to their desirable miniaturization, flexibility, and ...
Yaxuan Xiao +4 more
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Multi-silicon ridge nanofabrication by repeated edge lithography [PDF]
, 2009 We present a multi-Si nanoridge fabrication scheme and its application in nanoimprint\ud lithography (NIL). Triple Si nanoridges approximately 120 nm high and 40 nm wide separated\ud by 40 nm spacing are fabricated and successfully applied as a stamp in ...
Berenschot, J.W. +5 more
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Enhancement of silicon using micro-patterned surfaces of thin films [PDF]
European Cells & Materials, 2010 Micro-textured biomaterials might enhance cytocompatibility of silicon-based micro-electro-mechanical system (bio-MEMS) dummies. Photolithography-physical vapour deposition was used to produce diamond-like carbon (DLC) or Ti squares and circles on ...
E Kaivosoja +5 more
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