Results 11 to 20 of about 38,259 (291)
Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask
Micromachines, 2019 This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale.
Chun-Ying Wu, Heng Hsieh, Yung-Chun Lee
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Research on photolithography graphic pattern transfer technology
上海师范大学学报. 自然科学版, 2014 The process of the photolithography were introduced in this paper,including pre-baking,the photoresist coating,soft baking,alignment and exposure,post-exposure baking,development,hard baking.Then we mainly discussed the problems in the photolithography ...
ZHANG Yongping +10 more
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Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing
Micromachines, 2023 Modern optical systems often require small, optically effective structures that have to be manufactured both precisely and cost-effectively. One option to do this is using nanoimprint lithography (NIL), in which the optical structures are replicated as ...
Selina Burkert +2 more
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Improved MSRN-Based Attention Block for Mask Alignment Mark Detection in Photolithography
Applied Sciences, 2022 Wafer chips are manufactured in the semiconductor industry through various process technologies. Photolithography is one of these processes, aligning the wafer and scanning the circuit pattern on the wafer on which the photoresist film is formed by ...
Juyong Park, Jongpil Jeong
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Crystals, 2022 We present a process flow for wafer-scale fabrication of a surface phase grating with sub-micron feature sizes from a single semiconductor material. We demonstrate this technique using a 110-oriented GaP semiconductor wafer with second-order nonlinearity
Mohammad Bashirpour +3 more
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The Variables and Invariants in the Evolution of Logic Optical Lithography Process
Journal of Microelectronic Manufacturing, 2019 Photolithography has been a major enabler for the continuous shrink of the semiconductor manufacturing design rules. Throughout the years of the development of the photolithography, many new technologies have been invented and successfully implemented ...
Qiang Wu
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Advanced Materials Interfaces, 2023 The alluring optoelectronic properties of lead halide perovskites have continued to attract enormous interest from the scientific community. They are among the brightest candidates for future optoelectronic devices.
Gokul M. A., Atikur Rahman
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Information, 2023 In photolithographic processes, nanometer-level-precision wavefront-aberration models enable the machine to be able to meet the overlay (OVL) drift and critical dimension (CD) specifications.
Aris Magklaras +4 more
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Micromachines, 2020 A soundwave is transmitted by adjacent molecules in the medium, and depending on the type of sound, it exhibits various characteristics such as frequency, sound pressure, etc. If the acoustic wavelength of the soundwave is sufficiently long compared with
Sung Ho Lee +4 more
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Cell Migration According to Shape of Graphene Oxide Micropatterns
Micromachines, 2016 Photolithography is a unique process that can effectively manufacture micro/nano-sized patterns on various substrates. On the other hand, the meniscus-dragging deposition (MDD) process can produce a uniform surface of the substrate.
Sung Eun Kim +11 more
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