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Temperature-Assisted Gas-phase Silanization Using Different Silanes for Actomyosin-Based Nanodevices. [PDF]

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Erichlandwehr T   +6 more
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Physical Vapor Deposition

1998
Similar to CVD, PVD (physical vapor deposition) has an important position among film formation techniques. The most typical PVD technique is sputtering, which is used to produce aluminum alloys or barrier films with metals having a high melting point, and is used mainly for metal film formation.
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Physical Vapor Deposition

1989
In the early days of microelectronics, physical vapor deposition was simply applied to the evaporation of Al to form the high conductivity connections to transistors. With the ever-increasing complexity of silicon integrated circuits and the development of GaAs circuits, a much wider range of materials must be deposited to fulfill special needs for ...
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ZnO Nanocrystals Synthesized by Physical Vapor Deposition

Journal of Nanoscience and Nanotechnology, 2004
Various types of zinc oxide (ZnO) nanocrystais were synthesized by physical vaporization of zinc powders without the presence of catalysts and a subsequent exposure to air at a high temperature. These crystals were found to be composed of ZnO nanowires, sheets, and tetrapods. They were observed to crystallize as wurtzite ZnO single crystals.
Hansoo, Kim, Wolfgang, Sigmund
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Strontium hafnate films deposited by physical vapor deposition

Thin Solid Films, 2006
Abstract Strontium hafnate films are predicted to have desirable properties for use as a high-permittivity gate insulator. Such a film is of extreme interest to the scaling of Metal Oxide Semiconductor (MOS) transistors. Thin films of strontium hafnate have been prepared by cosputtering of Hf and SrO2.
I. McCarthy   +5 more
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Physical vapor deposition tool coatings

Surface and Coatings Technology, 1996
Abstract Physical vapor deposition (PVD) of hard coatings such as titanium nitride have been an industrial reality since the beginning of the 1980s. Two PVD processes, low voltage electron beam and cathodic arc deposition, were responsible for the early commercial success of hard coatings on high speed steel tooling.
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