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Physical vapor deposition (PVD) processes
Metal Finishing, 1995Summary Each of the PVD processes discussed has its advantages and disadvantages. Each requires different process monitoring and controlling techniques. Generally, the most simple technique and configuration that will give the desired film properties and most economical product throughput should be used.
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Physical Vapor Deposition; Sputtering
1990It is necessary in wafer processing to add conductive materials to serve as interconnects, and dielectrics as insulators on the wafer. Two commonly used methods for doing this are: physical vapor deposition (PVD), which involves vacuum evaporation and deposition, and sputtering, which takes place in a gas at low pressure.
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COATING, TITANIUM NITRIDE Physical Vapor Deposition
2021<div class="section abstract"> <div class="htmlview paragraph">This specification covers the requirements for the application and properties of a titanium nitride coating on metal parts applied by physical vapor deposition (PVD).</div></div>
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2017
<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard covers the requirements for the deposition of cadmium coatings on carbon steel, low alloy steels, high strength steels, corrosion resisting steels and other materials where appropriate.</div></div>
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<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard covers the requirements for the deposition of cadmium coatings on carbon steel, low alloy steels, high strength steels, corrosion resisting steels and other materials where appropriate.</div></div>
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2017
<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard specifies the requirements for coatings of titanium nitride on non-corrosion resisting and corrosion resisting steels, cast irons and other suitable materials. Standard engineering items such as coated tools, drills and dies would not normally be included.<
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<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard specifies the requirements for coatings of titanium nitride on non-corrosion resisting and corrosion resisting steels, cast irons and other suitable materials. Standard engineering items such as coated tools, drills and dies would not normally be included.<
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Multiscale Simulation of Physical Vapor Deposition
SSRN Electronic Journal, 2022Weicheng Xuan +5 more
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2017
<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard covers the requirements for coatings of high purity aluminum on low alloy steels, high strength steels, corrosion-resisting steels, aluminum alloys and titanium alloys and other materials where appropriate.</div></div>
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<div class="section abstract"> <div class="htmlview paragraph">This SAE Standard covers the requirements for coatings of high purity aluminum on low alloy steels, high strength steels, corrosion-resisting steels, aluminum alloys and titanium alloys and other materials where appropriate.</div></div>
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Physical Vapor Deposition -Present and Future
SAE Technical Paper Series, 1973<div class="htmlview paragraph">Recent advances in electron beam evaporation, using automated vacuum coating systems, are dramatically increasing the use of physical vapor deposition for both decorative and functional coating applications. Some examples of these applications are:</div> <div class="htmlview paragraph"> <ol class ...
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Direct synthesis and chemical vapor deposition of 2D carbide and nitride MXenes
Science, 2023, Chenkun Zhou, Alexander S Filatov
exaly

