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Piezoelectric Thin-Film Actuators

open access: yesJournal of The Surface Finishing Society of Japan, 2017
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Piezoelectric Actuators Characterization

2012 International Conference on Industrial Control and Electronics Engineering, 2012
This paper describes a system to drive piezoelectric actuators over more than one decade of voltages and one octave of frequencies, in order to perform high-speed complex impedance characterization at a user chosen voltage excitation level. This characterization provides information about electrical and mechanical characteristics of the device under ...
H. Meyer   +6 more
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Piezoelectric microflextensional actuator

SPIE Proceedings, 2004
This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V.
Jongpil Cheong   +2 more
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Cryogenic piezoelectric actuators

SPIE Proceedings, 2009
In this paper, PMN-PT single crystal piezoelectric stack actuators and flextensional actuators were designed, prototyped and characterized for space optics applications. Single crystal stack actuators with footprint of 10 mm x10 mm and the height of 50 mm were assembled using 10 mm x10mm x0.15mm PMN-PT plates.
Xiaoning Jiang   +2 more
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Piezoelectric Actuator Designs

2008
Piezoelectric actuators are getting immiscible parts of many important electromechanical and smart systems. Smart systems consist mainly of sensors, actuators, and signal processing units. Actuators are the responding units of many smart systems including those for active vibration and noise control, valve, shutter, focal lens, and many others ...
Dog?an A., Uzgur E.
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Piezoelectric Actuator Renaissance

Energy Harvesting and Systems, 2014
Abstract “Politico-engineering” in the twenty-first century is generating “Piezoelectric Actuator Renaissance” in the area of sustainability and crisis technologies in particular. This paper reviews the recent advances in materials, designing concepts, and new applications of piezoelectric actuators and describes the future perspectives ...
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