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High performance piezoresistive low pressure sensors
2016 IEEE SENSORS, 2016High performance piezoresistive low pressure sensors have been developed. The MEMS die has high sensitivity, superior linearity, low temperature dependence of output signal and excellent environmental stability. Small die size allows for the world's smallest packaged low pressure sensor solution.
Lihua Li +3 more
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Journal of microelectromechanical systems, 2022
In this paper, a mechanical-electrical-process integrated model of the piezoresistive pressure sensor sensitivity is established for the first time, and the nonlinearity is analyzed from two aspects of bridge arm resistance and piezoresistive stress ...
Chengwu Gao, Dacheng Zhang
semanticscholar +1 more source
In this paper, a mechanical-electrical-process integrated model of the piezoresistive pressure sensor sensitivity is established for the first time, and the nonlinearity is analyzed from two aspects of bridge arm resistance and piezoresistive stress ...
Chengwu Gao, Dacheng Zhang
semanticscholar +1 more source
Electro-elastic simulation of a piezoresistive pressure sensor
Microelectronics Journal, 1993Transport properties of the silicon crystal are sensitive, to some extent, to mechanical perturbations: this allows for integrating mechanical sensors, together with the sensing circuitry, within a silicon chip by using an almost standard IC technology.
P. Ciampolini +3 more
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An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
IEEE Transactions on Biomedical Engineering, 1973A thin-diaphragm piezoresistive pressure sensor for biomedical instrumentation has been developed using monolithic integratedcircuit (IC) techniques. The piezoresistive effect has been chosen for this device because it provides an observable resistance change that is a linear function of pressure and is observable at low stress levels.
, Samaun, K D, Wise, J B, Angell
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Hierarchical Fault Diagnosis Method for Piezoresistive Pressure Sensor Based on GAF and CNN-SVM
IEEE Transactions on Instrumentation and MeasurementThe requirements for reliability of piezoresistive pressure sensor in modern society are getting higher and higher because of wide application range of sensor and complex working environments.
Yi Ruan +5 more
semanticscholar +1 more source
International Journal of Biological Macromolecules, 2021
Hydrogel-based piezoresistive sensors have high practical value in many revolutionary applications, such as intelligent and electronic devices. However, with existing hydrogels, it is very difficult to achieve a combination of good mechanical properties,
Xiao Han +5 more
semanticscholar +1 more source
Hydrogel-based piezoresistive sensors have high practical value in many revolutionary applications, such as intelligent and electronic devices. However, with existing hydrogels, it is very difficult to achieve a combination of good mechanical properties,
Xiao Han +5 more
semanticscholar +1 more source
Materials Horizons
The burgeoning fields of wearable devices, medical monitoring and human-motion detection have spurred the interest in flexible piezoresistive pressure sensors, which in turn have raised concerns about the sustainable development of flexible electronics ...
Han Lu +8 more
semanticscholar +1 more source
The burgeoning fields of wearable devices, medical monitoring and human-motion detection have spurred the interest in flexible piezoresistive pressure sensors, which in turn have raised concerns about the sustainable development of flexible electronics ...
Han Lu +8 more
semanticscholar +1 more source
ACS Nano
Soft piezoresistive pressure sensors play an underpinning role in enabling a plethora of future Internet of Things (IoT) applications such as human-robot interaction (HRI) technologies, wearable devices, and metaverse ecosystems.
S. Kim +8 more
semanticscholar +1 more source
Soft piezoresistive pressure sensors play an underpinning role in enabling a plethora of future Internet of Things (IoT) applications such as human-robot interaction (HRI) technologies, wearable devices, and metaverse ecosystems.
S. Kim +8 more
semanticscholar +1 more source
Piezoresistive pressure sensors in the measurement of intervertebral disc hydrostatic pressure
The Spine Journal, 2009An implantable, freestanding, minimally invasive, intervertebral disc pressure sensor would vastly improve the knowledge of spinal biomechanics and the understanding of spinal disease. Additionally, it would improve clinical indications for surgical interventions in disc-related pathology.
Michael Kevin, Moore +3 more
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Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure
ACS Applied Materials & Interfaces, 2018High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the ...
Hongwei Li +5 more
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