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High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer
Sensors and Actuators A: Physical, 2012exaly
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring
IEEE SENSORS 2014 Proceedings, 2014Xiawei Meng, Yulong Zhao
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Metallic Packaging of a Piezoresistive Pressure Sensor
2002Weber, P., Briand, D., de Rooij, N. F.
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PIEZORESISTIVE SENSOR ELEMENT AND PIEZORESISTIVE PRESSURE SENSOR WITH MINIMIZED LONG-TERM DRIFT
JENNI KASPAR +4 moreopenaire +1 more source
Micromechanical piezoresistive pressure sensor device
2007MUCHOW JOERG, BENZEL HUBERT
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Method of fabricating a piezoresistive pressure sensor
2002VIGNA BENEDETTO +2 more
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