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High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity
Sensors, 2011Edmond Lou
exaly
High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer
Sensors and Actuators A: Physical, 2012exaly
Piezoresistive position sensor systems
2019JUTZI FABIO, BAYAT DARA, LANI SEBASTIEN
openaire +1 more source
PIEZORESISTIVE SENSOR ELEMENT AND PIEZORESISTIVE PRESSURE SENSOR WITH MINIMIZED LONG-TERM DRIFT
JENNI KASPAR +4 moreopenaire +1 more source

