Semi-autonomous scheme for pushing micro-objects [PDF]
-In many microassembly applications, it is often desirable to position and orient polygonal micro-objects lying on a planar surface. Pushing micro-objects using point contact provides more flexibility and less complexity compared to pick and place ...
Khan, Shahzad +2 more
core +1 more source
Graphene based piezoresistive pressure sensor
We present a pressure sensor based on the piezoresistive effect of graphene. The sensor is a 100 nm thick, 280 μm wide square silicon nitride membrane with graphene meander patterns located on the maximum strain area. The multilayer, polycrystalline graphene was obtained by chemical vapor deposition.
Zhu, S.E. (author) +3 more
openaire +4 more sources
Pressure transducer and system for cryogenic environments [PDF]
A silicon pressure die is bonded to a borosilicate substrate above the pneumatic port. A Wheatstone bridge circuit is formed on the silicon pressure die and has bridge elements of silicon doped with boron to a deposit density level of approximately 1 x ...
Chapman, John J.
core +1 more source
Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane [PDF]
This paper presents for the first time the effect of strain on the electrical conductivity of p-type single crystalline 3C-SiC grown on a Si (111) substrate.
Dao, Dzung Viet +3 more
core +2 more sources
Exfoliated Graphite Nanoplatelet-Carbon Nanotube Hybrid Composites for Compression Sensing [PDF]
In this study, we investigated the gauge factor and compressive modulus of hybrid nanocomposites of exfoliated graphite nanoplatelets (xGnP) and multiwalled carbon nanotubes (MWCNTs) in a polydimethylsiloxane matrix under compressive strain.
Jeong, Changyoon, Park, Young-Bin
core +1 more source
Resonant Varifocal Micromirror with Piezoresistive Focus Sensor [PDF]
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The
Kenta Nakazawa +6 more
openaire +3 more sources
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror.
Yameng Shan +6 more
doaj +1 more source
Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package [PDF]
A highly miniaturized piezoresistive humidity sensor has been developed. The starting point of the development was a 1 × 1 mm2 piezoresistive pressure sensor chip.
T. Waber +6 more
doaj +1 more source
Tactile on-chip pre-processing with techniques from artificial retinas [PDF]
The interest in tactile sensors is increasing as their use in complex unstructured environments is demanded, like in tele-presence, minimal invasive surgery, robotics etc.
Liñán Cembrano, Gustavo +4 more
core +1 more source
Piezoresistive foam sensor arrays for marine applications [PDF]
Spatially-dense pressure measurements are needed on curved surfaces in marine environments to provide marine vehicles with the detailed, real-time measurements of the near-field flow necessary to improve performance through flow control. To address this challenge, a waterproof and conformal pressure sensor array comprising carbon black-doped-silicone ...
Jeff E. Dusek +2 more
openaire +4 more sources

