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Surface and Interface Analysis, 2002
Abstract The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm.
I. W. Rangelow +3 more
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Abstract The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm.
I. W. Rangelow +3 more
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Piezoresistive Pressure Sensors
2020Information about pressure and its measurement by means of pressure sensors is interesting in many different application areas. Contemporary applications, as for example the automotive industry, aerospace and medical technology, require ever smaller, adaptable and highly accurate pressure sensors.
Stephanus Büttgenbach +3 more
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Differential Piezoresistive Pressure Sensor
2007 International Semiconductor Conference, 2007The pressure microsensor presented in this paper is based on a thin, elastic membrane, with boron implanted piezoresistive elements included, positioned in the maximum mechanical stress areas on the membrane. The pressure range for the developed sensors is in the 0divide400 mbar range, and this is the main novelty of this device.
B. Firtat +4 more
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A piezoresistive humidity sensor
Sensors and Actuators A: Physical, 1994Abstract This paper deals with a new type of humidity sensor. Whereas conventional humidity sensors utilize the change of the specific resistivity or the dielectric properties here the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane.
G. Gerlach, K. Sager
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