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Temperature compensation of piezoresistive pressure sensors
Sensors and Actuators A: Physical, 1992Abstract A major problem associated with piezoresistive pressure sensors is their cross sensitivity to temperature. The influence of temperature is manifested as a change in the span and offset of the sensor output. Moreover, in batch fabrication, minor process variations change the temperature characteristics for individual units.
Muhammad Akbar, Michael A. Shanblatt
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High Performance Piezoresistive Micro Strain Sensors
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007This paper presents results of studies on the high performance silicon piezoresistive bridge strain sensors. The microfabricated, boron diffused, piezoresistive strain sensors constructed in Wheatstone bridge structure were used in this work. The temperature stability and time drift problems were studied and improvements were made. Experimental results
Hung-I Kuo, Jun Guo, Wen H. Ko
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Simulation of piezoresistive MEMS tactile sensor
National Conference on Challenges in Research & Technology in the Coming Decades (CRT 2013), 2013The cost of the silicon-based MEMS fabrication is still relatively high, thus an alternative process should be developed for low cost applications. In this proposal, we are planning to develop a low-cost non-silicon-based process for MEMS tactile sensor fabrication.
null Sathyanarayana +2 more
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MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
Microsystem Technologies, 2022Lei Wei +5 more
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Piezoresistive Nanowire-Based Electromechanical Sensors
2023B. Erdem Alaca, Mehrdad Karimzadehkhouei
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Piezoresistive Sensor Device with Amplification Module
2018La présente invention concerne un dispositif capteur comprenant un module capteur connecté à un module d'amplification, ledit module d'amplification comprenant au moins un transistor à effet de champ (FET) organique et amplifiant un signal émis par ledit module capteur, ledit module capteur et ledit module d'amplification étant co-intégrés sur un même ...
Todri-Sanial, Aida +2 more
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