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Mechanism of germanium plasma nitridation
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2006The mechanisms of plasma nitridation of germanium (Ge) and silicon (Si) substrates are discussed based on plasma characteristics and oxynitride film properties. Optical emission spectroscopy (OES) study and x-ray photoelectron spectroscopy were utilized to characterize the plasma and film properties, respectively. In this study, high pressure (1.8Torr)
Takuya Sugawara +2 more
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Metastable states and nitriding plasmas
Surface and Coatings Technology, 1997Abstract The results of investigations of slow diffusive effects in pre-breakdown nitrogen discharges, the effects of quenching by impurities, and the influence of surface conditions on metastable-particle–surface interactions are discussed briefly. This work suggests that two distinct neutral metastable species may be active in nitrogen plasmas used
M.J. Baldwin, S.C. Haydon, M.P. Fewell
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Plasma Nitridation of Metal Oxides
Chemistry of Materials, 1996Three binary nitride materials (TiN, AlN, and GaN) were prepared by reaction of a microwave generated nitrogen/hydrogen plasma with TiO2, Al(OH)3, and Ga2O3, respectively.
Joel D. Houmes, Hans-Conrad zur Loye
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Plasma nitriding of microalloyed steel
Surface and Coatings Technology, 1995Abstract 3icroalloyed or high strength low alloy (HSLA) steels are carbon-manganese steels containing small amounts of Nb, V or Ti. The excellent mechanical properties of these alloys, particularly high yield strength, usually obviate the need for expensive quench and tempering operations.
F. Mahboubi +4 more
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Silicon Nitride Layers Grown by Plasma Enhanced Thermal Nitridation
1981Silicon nitride layers have been produced by plasma enhanced thermal nitridation of silicon. The growing process has been studied by measuring the layer thickness, ranging from 45 to 70 A, as a function of time and RF power. A depth profile, obtained by Rutherford Back Scattering, showed that the nitrogen to oxygen ratio was about 2.
E. J. Korma, J. Snijder, J. F. Verwey
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Plasma Nitriding Characteristics of Sm2Fe17Nx
Chemistry Letters, 1992Abstract Nitriding characteristics of Sm2Fe17Nx were studied by applying a plasma technique to Sm2Fe17 in a stream of N2-H2 mixed gas. The reaction took place even at room temperature, but the formation of nitride was limited around the surface region. Some mild heating was required to realize the well-nitriding up to bulk level.
Ken-ichi Machida +5 more
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Low-temperature plasma-assisted nitriding
Surface and Coatings Technology, 2000Plasma-assisted nitriding is an attractive surface treatment for metallurgical surface modification to improve wear, hardness and fatigue resistance of ferrous and non-ferrous materials. For this purpose, ion nitriding by a d.c. glow discharge is generally efficient for numerous materials. However, for some metals and alloys, the processing temperature,
T Czerwiec, N Renevier, H Michel
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The Influence of Plasma Nitriding Time on Mechanical Properties of Plasma Nitriding steel
The aim of this study is to investigate the effect of plasma nitriding time on mechanical and tribological behavior of nitriding coatings produced by plasma-assisted chemical vapor deposition (PACVD). The heat treatment of quench and temper was carried out on hot work AISI H12 (DIN 1.2606) steel samples. A group of samples was plasma nitrided at 470 °CShafiei, Seyed Mohammad +2 more
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Plasma deposited aluminum nitride films
Conference on Electrical Insulation & Dielectric Phenomena - Annual Report 1986, 1986Thin films were deposited at room temperature by plasma polymerization of trimethylaluminum and nitrogen or ammonia. These films appeared to consist of amorphous aluminum nitride. Spectroscopic studies of the plasma light emission indicated that the choice of nitrogen or ammonia as the nitrogen-containing reactant has little effect on the plasma ...
R. K. Sadhir, W. A. Byers
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Plasma electrolytic nitriding of steels
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2017This review deals with the current scientific and technical results of the plasma electrolytic nitriding of constructional steels. The physicochemical features of diffusion saturation from vapor‒gas media are revealed and developed electrolyte compositions and nitriding modes are presented.
P. N. Belkin, S. A. Kusmanov
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