Results 231 to 240 of about 1,643,465 (296)
Some of the next articles are maybe not open access.
Plasma Parameters in a New Plasma Source
IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science, 2005Summary form only given. Optimization of plasma sources needs knowledge of plasma parameters, first of all, electron temperature (Te) and plasma density (Np). This paper is concerned with experimental study of Te and Np in a new type plasma source for dry etching.
V.N. Volynets +4 more
openaire +1 more source
Plasma parameters in a multidipole plasma system
The European Physical Journal D, 2000Plasma potential and electron number densities and electron temperatures under bi-Maxwellian approximation for electron distribution function of the multidipole argon plasma source system were measured for a gas pressure ranging between 10-4 and 10-3 mbar and an anode-cathode voltage ranging between 40 and 120 V but a constant discharge current ...
D. Ruscanu, V. Anita, G. Popa
openaire +1 more source
Review of Scientific Instruments, 1969
A slide rule has been developed to facilitate rapid calculation of basic plasma parameters such as electron number density, Debye length, and the number of particles in a Debye sphere. These parameters can be readily calculated within an accuracy of 1.5% for most practical situations involving the application of plasma probes.
D. R. Nordlund, O. P. Breaux
openaire +1 more source
A slide rule has been developed to facilitate rapid calculation of basic plasma parameters such as electron number density, Debye length, and the number of particles in a Debye sphere. These parameters can be readily calculated within an accuracy of 1.5% for most practical situations involving the application of plasma probes.
D. R. Nordlund, O. P. Breaux
openaire +1 more source
Characterization of hot dense plasma with plasma parameters
Radiation Physics and Chemistry, 2018Abstract Characterization of hot dense plasma (HDP) with its parameters temperature, electron density, skin depth, plasma frequency is demonstrated in this work. The dependence of HDP parameters on temperature and electron density is discussed.
Narendra Singh, Arun Goyal, S. Chaurasia
openaire +1 more source
Important Parameters in Plasma Fractionation
Vox Sanguinis, 1986Abstract. Important parameters in plasma fractionation are derived from the needs of providing assured quality and the operational requirements of good manufacturing practice. There are many inputs to quality assurance, collectively described as the quality design of the manufacturing process.
openaire +2 more sources
Journal of the Physical Society of Japan, 1990
The swarm parameters related to electrons and ions, when they move in gases, are calculated as a function of E / p , where E and p are the electric field and the pressure. The plasma parameters as a function of the electron temperature, T e , cannot be simply deduced from swarm parameters, because the energy distribution function is quite different in ...
openaire +1 more source
The swarm parameters related to electrons and ions, when they move in gases, are calculated as a function of E / p , where E and p are the electric field and the pressure. The plasma parameters as a function of the electron temperature, T e , cannot be simply deduced from swarm parameters, because the energy distribution function is quite different in ...
openaire +1 more source