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Porous Silicon Micromachining Technology
2014In this chapter, silicon electrochemical micromachining (ECM) technology is reviewed with particular emphasis to the fabrication of complex microstructures and microsystems, as well as to their applications in optofluidics, biosensing, photonics, and medical fields.
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2014
In this chapter, the state of the art on porous silicon gas sensors , both electrical and optical, is reviewed by paying special emphasis on the advancement of gas sensor architectures that has occurred over the two last decades, as well as on the different functionalization approaches implemented in and chemical species sensed with such architectures.
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In this chapter, the state of the art on porous silicon gas sensors , both electrical and optical, is reviewed by paying special emphasis on the advancement of gas sensor architectures that has occurred over the two last decades, as well as on the different functionalization approaches implemented in and chemical species sensed with such architectures.
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Proceedings of the International School of Physics “Enrico Fermi”, 1999
Pavesi, Lorenzo, Mulloni, Viviana
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Pavesi, Lorenzo, Mulloni, Viviana
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Applied Physics Letters, 1991
Porous silicon membranes have been formed by electrochemical etching through wafers up to 500 μm in thickness. The results show that there is essentially no limit to the thickness of porous silicon layers and that self-supporting porous structures can be formed by this method.
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Porous silicon membranes have been formed by electrochemical etching through wafers up to 500 μm in thickness. The results show that there is essentially no limit to the thickness of porous silicon layers and that self-supporting porous structures can be formed by this method.
openaire +1 more source