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Pulsed laser deposition of gallium nitride thin films on sapphire substrates
, 2020The results of an experimental study of the surface morphology and structural properties of thin films of gallium nitride on sapphire obtained by pulsed laser deposition are presented.
O. Devitsky, D. Nikulin, I. Sysoev
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YBaCuO Films by Pulsed Laser Deposition and Sputtering
1993In-situ YBa2Cu3O7 films of high quality (from a Jc(T, H) and Tc point of view) have been fabricated by both, pulsed laser deposition (PLD), and on-axis rf magnetron sputtering techniques on SrTiO3 (100) and LaA103 (100) substrates. In the PLD method, a pulsed Nd:YAG laser with the 355 nm tripled wave length and the energy density of 8 J/cm2 has been ...
T. Koga, J. H. Xu, B. M. Moon, K. V. Rao
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Pulsed laser annealing of amorphous two-dimensional transition metal dichalcogenides
, 2020Large-area, flexible, two-dimensional transition metal dichalcogenide semiconductor materials (MoS2 and WSe2) were synthesized via magnetron sputtering of amorphous stoichiometric precursor materials on polydimethylsiloxane polymer substrates.
Rachel H. Rai +4 more
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, 2020
Pure Cu and Cu80Zr20 thin films with a thickness of 10 nm were deposited on glass substrates using a high-vacuum sputtering system. A pulsed-laser dewetting process was then performed using a NIR laser system.
H. K. Lin +4 more
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Pure Cu and Cu80Zr20 thin films with a thickness of 10 nm were deposited on glass substrates using a high-vacuum sputtering system. A pulsed-laser dewetting process was then performed using a NIR laser system.
H. K. Lin +4 more
semanticscholar +1 more source
Plasma diagnostics of hybrid magnetron sputtering and pulsed laser deposition
Surface and Coatings Technology, 2006Abstract This paper investigates the use of advanced triggering to synchronize a pulsed laser ablated plasma from a ceramic target with a pulsed DC sputtering plasma from a metal target for the purposes of depositing nanocomposite thin-films at low substrate temperatures.
Jones, John G. +3 more
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Synthesis of tungsten silicide by pulsed laser irradiation of sputtered alloy layers
Thin Solid Films, 1993Abstract Tungsten silicide was synthesized by multipulse XeCl laser irradiation of co-sputtered WSi mixtures 140 and 460 nm thick on single-crystal silicon wafers. It is shown that at certain equilibria between contradictory influences of the depth of melting, stress generation, intermixing and crystallization it is possible to grow good quality ...
S. LUBY +5 more
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AlN thin films obtained by pulsed laser deposition and reactive sputtering
2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676), 2004AlN thin films with thickness in nanometer range were prepared by pulsed laser deposition techniques and by reactive sputtering techniques. Investigations by XRD, SEM, AFM, and piezoelectric measurement were performed on the obtained AlN thin films. A comparison between some of the properties of the two types of films is presented.
F. Craciunoiu +6 more
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Laser-pulse sputtering of atoms and molecules Part II. Recondensation effects
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994Abstract When solids are sputtered with sufficiently intense laser pulses, particle release takes place, and a terminating expansion then develops. The resulting gas-dynamic processes depend on whether backscattered particles are subject to recondensation or reflection.
Roger Kelly, Antonio Miotello
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Pulsed laser deposition of complex oxide heteroepitaxy
Zhongguó wùli xuékan, 2019The modern studies of complex oxides have been mainly driven by the development of advanced growth and characterization techniques, which provide researchers unprecedented access to new insights and functionalities of these materials. Epitaxial growth of
Yen-Lin Huang +5 more
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Optical damage of sputtered gold films irradiated with femtosecond laser pulses
SPIE Proceedings, 2001Multi-shot damage tests were performed of gold coated mirrors in the femtosecond and in the nanosecond laser pulse regime. Sputtered gold films from different suppliers of various thicknesses were investigated. Considerable differences in the optical quality and the damage threshold are reported.
R. Boedefeld +6 more
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