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FOUP purge performance improvement using EFEM flow converter
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2016Front Opening Unified Pod (FOUP) purging with nitrogen or clean dry air (CDA) is well known as the most effective method to protect wafers inside FOUPs from internal as well as external contaminations, e.g. particles, airborne molecular contaminants, humidity and oxygen, which can potentially damage integrated circuits (IC) and significantly impact ...
Seong Chan Kim, Greg Schelske
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Examination of material outgassing in the air and purging flow environments
SPIE Proceedings, 2004This paper examines outgassing kinetics in the air and purging flow environments, as well as including a comparison to full outgassing in vacuum. The experimental data and models reported in the literature on the material outgassing in those environments are examined and summarized.
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The effect of purge gas flow rate on thermogravimetric experiments
Thermochimica Acta, 1983This paper describes research carried out to elucidate the reasons for the unusual behaviour of lead azide, Pb(N,),, in thermogravimetric TG and differential scanning calorimetry DSC experiments reported by other workers [ 11. They noted that in a DSC experiment Pb(N,), behaved in the expected manner (i.e.
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Effect of misalignment at 2nd vane endwall on heat transfer with purge flow
International Journal of Heat and Mass Transfer, 2021Jeongju Kim +2 more
exaly
Exploration Extravehicular Activity Purge Flow Assessment
41st International Conference on Environmental Systems, 2011Moses Navarro +2 more
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Studies of the purging flow protection of infrared telescopes
20th Aerospace Sciences Meeting, 1982E. MUNTZ, M. HANSON
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Research on purge gas flow characteristics in different pebble bed structures for fusion blanket
Progress in Nuclear Energy, 2023Mingzhun Lei, Sumei Liu, Qigang Wu
exaly
Unsteady flow aspects of purged spark gap recovery
27th Aerospace Sciences Meeting, 1989W. THAYER, C. LO, A. COUSINS
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Satellite protection and drag reduction using a purging gas flow
1995We have used the DSMC method to determine contamination (impingement of atmospheric molecules) and the aerodynamic forces on a cold satellite when a protective “purge gas” is ejected from a sting protruding ahead of the satellite. Forward ejection of the purge gas provides the greatest protection for a given mass of purge gas and the aerodynamic drag ...
Cathcart, G. P., Macrossan, M. N.
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