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Simulations of rarefied gas flows

2013
The new generation of Lithography equipment of ASML uses rarefied gas flows in order to keep the mirrors from blackening. These flows cannot be modeled by conventional computational fluid dynamics based on the Navier-Stokes, NS, equation, because the continuum approach is no longer valid.
openaire   +1 more source

Photophoresis of a spherical particle in a rarefied gas

Physics of Fluids A, Fluid Dynamics, 1993
Vladimir Chernyak, Sergey Beresnev
exaly  

A topology optimization method in rarefied gas flow problems using the Boltzmann equation

Journal of Computational Physics, 2019
Shigeru Takata   +2 more
exaly  

Rarefied gas dynamics

Journal of the Franklin Institute, 1962
openaire   +1 more source

The role of the dynamic pressure in stationary heat conduction of a rarefied polyatomic gas

Physics Letters, Section A: General, Atomic and Solid State Physics, 2014
Takashi Arima   +2 more
exaly  

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