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Similarity of Microscale and Rarefied Gas Flows
ASME 3rd International Conference on Microchannels and Minichannels, Parts A and B, 2005The similarity between micro gas flow and rarefied gas flow was numerically investigated using a DSMC method. With compressibility and rarefaction effects, the similarity parameters are the Mach number and the Knudsen number, since the Reynolds number is dependent on the Mach number and the Knudsen number for an ideal gas.
Xudong Lan, Zhixin Li, Moran Wang
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Rarefied Gas Flow Around a 3D-Deltawing
1991This paper presents numerical results for hypersonic flows around a 3D-deltawing at a low Knudsen number. The underlying body geometry as well as the physical parameters correspond to testcase 7.2.1. of the workshop. The numerical method used for the calculations is the Finite-Pointset-Method (FPM) developed at the University of Kaiserslautern since ...
F. Gropengieβer +3 more
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Simulations of rarefied gas flows
2013The new generation of Lithography equipment of ASML uses rarefied gas flows in order to keep the mirrors from blackening. These flows cannot be modeled by conventional computational fluid dynamics based on the Navier-Stokes, NS, equation, because the continuum approach is no longer valid.
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Rarefied gas flow into vacuum through linearly diverging and converging channels
International Journal of Heat and Mass Transfer, 2023Oleg Sazhin
exaly
Hypersonic flows of rarefied gas
Journal of Applied Mathematics and Mechanics, 1962openaire +1 more source
Rarefied gas flow through a long rectangular channel
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1999Felix Sharipov
exaly
Rarefied gas flow through a long tube at any pressure ratio
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1994Felix Sharipov
exaly
Rarefied gas flow through a long tube at any temperature ratio
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1996Felix Sharipov
exaly

