Results 131 to 140 of about 106,837 (225)

Collective fabrication of 20 MHz resonators by deep Reactive Ion Etching on 3'' quartz wafers

, 2011
J.J. Boy, H. Tavernier, X. Vacheret, Thierry Laroche, Alexandre Clairet   +4 more
openalex   +2 more sources

Reactive ion etching of polymer materials for an energy harvesting device

, 2012
Fei Wang, C. V. Bertelsen, Gustav Erik Skands, T. Pedersen, O. Hansen   +4 more
semanticscholar   +1 more source

Selective Etching of Multi-Stacked Epitaxial Si_1-xGe_x on Si Using CF₄/N₂ and CF₄/O₂ Plasma Chemistries for 3D Device Applications. [PDF]

Materials (Basel)
Kim J, Kang J, Yoon D, Chung UI, Ko DH.
europepmc   +1 more source

Broadband antireflection silicon carbide surface by self-assembled nanopatterned reactive-ion etching

, 2012
Yiyu Ou, Imran Aijaz, Valdas Jokubavičius, Rositza Yakimova, Mikael Syväjärvi, Haiyan Ou   +5 more
openalex   +1 more source

Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching. [PDF]

ACS Appl Mater Interfaces
Sano KH, Ono Y, Tsukiyama K, Nagai S, Saito A, Hayashi Y, Yanagitani T.   +6 more
europepmc   +1 more source

Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging. [PDF]

Microsyst Nanoeng
Pan A, Zhu X, Zhu C, Yin J, Hasan MS, Liu Z, Ban D, Cui B.   +7 more
europepmc   +1 more source

Effects of combined process of reactive ion etching and dynamic chemical etching on UV laser damage resistance and surface quality of fused silica optics

, 2018
Laixi Sun, Jin Huang, Ting Shao, Xin Ye, Qingzhi Li, Xiaodong Jiang, Weidong Wu, Liming Yang, Wanguo Zheng   +8 more
openalex   +1 more source

Experimental study of inductively coupled plasma etching of patterned single crystal diamonds. [PDF]

Sci Rep
Zhao L, Wang X, Jiang N, Nishimura K, Yi J, Fang S.   +5 more
europepmc   +1 more source

Preparation of Infrared Anti-Reflection Surfaces Based on Microcone Structures of Silicon Carbide. [PDF]

Materials (Basel)
Li R, Ji X, Chang S, Tian H, Zhao Z, Chu C.   +5 more
europepmc   +1 more source

A Versatile Top-Down Patterning Technique for Perovskite On-Chip Integration. [PDF]

ACS Nano
Fabrizi F, Goudarzi S, Khan S, Mohammad T, Starodubtceva L, Cegielski PJ, Thiel F, Özen S, Schiffer M, Lang F, Bolívar PH, Riedl T, Müller-Newen G, Anantharaman SB, Mohammadi M, Lemme MC.   +15 more
europepmc   +1 more source