Results 141 to 150 of about 73,664 (313)

Etch rate optimization in reactive ion etching of epoxy photoresists

, 2009
Maarten Driesen, Kristof Wouters, Robert Puers   +2 more
openalex   +1 more source

Etching characteristics of LiNbO₃ crystal by fluorine gas plasma reactive ion etching [PDF]

, 2001
Tumura Masashi, Shinzo Yoshikado
openalex   +1 more source

Spectrally Tunable 2D Material‐Based Infrared Photodetectors for Intelligent Optoelectronics

Advanced Functional Materials, EarlyView.
Intelligent optoelectronics through spectral engineering of 2D material‐based infrared photodetectors. Abstract The evolution of intelligent optoelectronic systems is driven by artificial intelligence (AI). However, their practical realization hinges on the ability to dynamically capture and process optical signals across a broad infrared (IR) spectrum.
Junheon Ha, Yingshan Ma, Yong Nam An, Sung‐Un An, Hyeon Hak Jung, Suvi‐Tuuli Varjamo, Jiwon Yoo, Junho Min, Hanvit Kim, Faisal Ahmed, Sang Hoon Chae, Young Min Song, Weiwei Cai, Tawfique Hasan, Zhipei Sun, Dong‐Ho Kang, Hyeon‐Jin Shin, Yunyun Dai, Hoon Hahn Yoon   +18 more
wiley   +1 more source

THE INFLUENCE OF MICROWAVE CF₄ PLASMA ACTIVATION ON THE CHARACTERISTICS OF REACTIVE ION ETCHING OF MONO-SI

, 2017
S. Bordusau, S. Madveika, M. Lushakova, N. S. Kovalchuk   +3 more
openalex   +1 more source

A Tracer Diffusion Study of Diverse Photo‐Ionic Phenomena in Strontium Titanate

Advanced Functional Materials, EarlyView.
Two strong interfacial photo‐ionic effects are demonstrated for the model system SrTiO3 through the application of isotope exchange experiments: UV illumination is found to enhance the oxygen surface exchange coefficient by several orders of magnitude and to depress the surface space‐charge potential substantially.
David M. Schwenkel, Timon F. Kielgas, George F. Harrington, Roger A. De Souza   +3 more
wiley   +1 more source

On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO₂ and Si_xN_y) in Multi-Component Fluorocarbon Gas Mixtures. [PDF]

Materials (Basel), 2021
Efremov A, Lee BJ, Kwon KH.
europepmc   +1 more source

Enhanced planarization technology by reactive ion beam etching and using a nanoimprint resist [PDF]

Lukas P. Lingenfelder, Annemarie Finzel, Gregor Dornberg, Joachim Zajadacz, Frank Frost   +4 more
openalex   +1 more source

Laser‐Induced Microfabrication of Carbon Nanostructure: Processing Mechanism and Application for Next‐Generation Battery Technology

Advanced Functional Materials, EarlyView.
The article reviews laser‐processed carbons from various precursors, processing mechanism and their application in advanced batteries. The laser process is chemical free, fast, and scalable, enabling improved battery performance and stability for Li, Na, and Zn battery technologies.
Sujit Deshmukh, Shaista Nouseen, Martin Pumera   +2 more
wiley   +1 more source

Tilted Micro Air Jet for Flow Control

, 2009
In this paper, we present an interesting method to microfabricate a tilted micro air jet generator. We used the well-know deep reactive ion etching (DRIE) technique in order to realize in a silicon substrate a double side etching.
Malapert, Julien, Manceau, Jean-François, Yahiaoui, Réda, Zeggari, Rabah   +3 more
core   +1 more source

Mesoporous Carbon Thin Films with Large Mesopores as Model Material for Electrochemical Applications

Advanced Functional Materials, EarlyView.
Mesoporous carbon thin films possessing 70 nm mesopores are prepared on titanium substrates by soft templating of resol resins with a self‐synthesized poly(ethylene oxide)‐block‐poly(hexyl acrylate) block copolymer. A strategy to avoid corrosion of the metal substrate is presented, and the films are extensively characterized in terms of morphology ...
Lysander Q. Wagner, Joshua Schober, Pascal Dippell, Chantal Glatthaar, Smail Mekhilef, David Schäfer, Hannes Hergert, Marcus Rohnke, Matthias T. Elm, Bernd M. Smarsly   +9 more
wiley   +1 more source