Halogen-Free Anisotropic Atomic-Layer Etching of HfO<sub>2</sub> at Room Temperature. [PDF]
Hsiao SN +5 more
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Terahertz graphene-based tunable capacitance metamaterials with ultra-high amplitude modulation depth. [PDF]
Guo ZJ, Wu GB.
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Thermoplasmonic Nanorings via Sputter Deposition. [PDF]
Baami González X +2 more
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Surface Morphology and Electrochemical Behavior of Microstructured Cu Electrodes in All-Solid-State Sodium Batteries. [PDF]
Prior T +10 more
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AlScN Thin Films for the Piezoelectric Transduction of Suspended Microchannel Resonators. [PDF]
Abdelaal Y, Liffredo M, Villanueva LG.
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Atmospheric pressure plasma etching of Ti-6Al-4 V using SF<sub>6</sub> etchant. [PDF]
Bishop A +5 more
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High-efficiency oxygen evolution electrocatalysis enabled by Ar/O<sub>2</sub> plasma-induced synergistic modifications in NiFe Prussian blue analogue systems. [PDF]
He Y +8 more
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Valence fragmentation dynamics of a promising low global warming etching gas CF<sub>3</sub>CHCF<sub>2</sub>. [PDF]
Nguyen TT +3 more
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Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression. [PDF]
Li H +5 more
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Biomimetic Conical Microhole Architecture Enabling 18.4%-Efficient Silicon Solar Cells with Superior Durability. [PDF]
Ahn Y +5 more
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